Used AMAT Centura DPS & DPS+: Slash Etch Tool Costs

Buy second-hand AMAT Centura DPS/DPS + Etching Machine: How to Save Money and Avoid Pit?

Compared with purchasing a new machine, buying a second-hand applied material (AMAT)Centura DPS or DPS + etching machine can directly cut the depreciation cost of equipment for a single wafer by about 55%. In the mature process of metal and polysilicon etching, this series of machines is still the “gold standard” in the industry-with very little budget (CAPEX), you can get line width (CD) control capability comparable to that of new machines. Of course, the key to whether this money can really be saved is that you have to keep an eye on the hardware serial number to make sure it is completely in tune with your process.

Cheap is on the one hand, for 8-inch (200mm) fabs, the biggest temptation is actually “plug and play”. At present, the original factory (OEM) has to wait 12 to 18 months for delivery. If you know the business and match the second-hand chamber reasonably, you can immediately increase the production capacity. However, the water of the second-hand equipment is very deep. Did you pick up the leak or bought a bottomless pit? Let’s break off the technical details and the dark pit inside and 1 the plate.

Technology Selection: Does Your Process Need DPS Or DPS?

Do you choose the standard version of DPS or the “” number? Don’t just look at the price, it mainly depends on how picky your process is about plasma density accuracy and wafer edge uniformity. Although both use decoupled plasma source (DPS) technology, the “” version has made some inconspicuous but extremely fatal upgrades in hardware, which directly determines your yield when making high-density interconnection technology.

Standard version DPS: logic chips or power semiconductors of 0.18 microns and above, it is sufficient. It uses a basic inductive coupling coil, which can well decouple the ion density and ion energy, but if it is used to cut very narrow grooves, it is a bit difficult.

DPS: Optimized coil design and upgraded chamber liner to significantly reduce particle contamination. If you are doing 90 nm to 65 nm metal stack etching, defect density is the number one enemy that affects yield, then close your eyes and choose DPS.

Feature	Standard DPS	DPS+
Target Process Node	0.18 μm and Above	90 nm – 65 nm
Coil Design	Standard Inductive Coupling Coil	Optimized Inductive Coupling Coil
Plasma Density Precision	High	Very High
Edge-of-Wafer Uniformity	Good	Excellent
Particle Contamination	Standard	Significantly Reduced
Chamber Liner	Standard Liner	Updated Low-Particle Liner
Best Application	Logic Devices, Power Semiconductors	High-Density Interconnect (HDI), Metal Stack Etching
Ultra-Narrow Trench Etching	Limited Capability	Optimized Performance
Primary Advantage	Reliable Plasma Decoupling	Higher Yield & Lower Defect Density

Buy Second-Hand Centura, Be Careful Of These “Dark Pits”

Buying second-hand equipment is the most taboo to “judge people by their appearance”. It is meaningless to repaint the shell. The state of the anodized layer inside the vacuum chamber determines the true residual value of this machine. If there is irreversible pitting or discoloration on the inner wall of the chamber, I can guarantee that if the equipment runs for less than a quarter, your maintenance fee will be completely out of control.

In addition to looking at the inner wall, when going to the inspection machine, focus on these places that are easy to step on the pit:

Old radio frequency generator (RF Generator): check whether the radio frequency equipped with the machine is a model that has been discontinued by the original factory. In case of failure, the control interface of the whole chamber will have to be greatly changed, and the cost of single chamber transformation will approach 30000 US dollars per minute.

Remaining life of the electrostatic chuck (ESC): Be sure to ask the seller for the “hours-on” log of the ESC. For a scrapped 8-inch ESC, the money can account for nearly 1/4 of the entire chamber renovation cost.

Calibration pitfalls of mass flow meters (MFCs): Used MFCs often have internal corrosion or “drift”. If there is no qualified recalibration, the gas flow accuracy will be biased and the etching rate will be absolutely uneven.

Throttle valve (Throttle Valve/VPE) slow response: measure its response time. The valve action is 1 slow, the pressure will appear peak fluctuations, in the plasma glow phase is likely to waste 1 the entire batch of wafers.

Robot (Robot) repeat positioning accuracy: focus on the Centura VHP (ultra-high capacity) manipulator ceramic blade and hub. Once the bearing is worn, the wafer will be biased, and it is easy to stage a disaster-level “wafer landslide” in the transmission chamber “.

Evaluating The State Of The Equipment “Reliability Pyramid”

In order to standardize the evaluation of used equipment, I have developed a set of “reliability pyramid” models myself. Next time you buy a machine, follow these three levels to audit:

Bottom foundation (operation maintenance): integrity of the main frame (Mainframe), VHP manipulator accuracy, and vacuum sealing of the Load Lock (in and out of the material cavity). These are the foundations of a stable machine (Uptime).

Core indicators (process assurance): chamber lining condition, ceramic dome (Dome) color, MFC accuracy, and radio frequency matching (RF Match) speed. This layer determines how big your craft window is.

Top-level architecture (data protection): software version (minimum B5 compatibility), SECS/GEM communication stability and instability, and the ability to collect offline data.

Practical Case: 6-To-8 Upgrade Of Power Semiconductor Plants

A while ago, in order to expand the production line of MOSFET, a leading power semiconductor factory did not act as a big enemy to buy downgraded new 12-inch equipment, but directly installed three refurbished AMAT Centura DPS+.

The effect is surprisingly good: they took a step “mixed purchasing” of chess —— bought the main frame second-hand, and the chamber was equipped by a professional third-party refurbisher. The initial investment alone saved $1.2 million. Not only that, they achieved 8-inch mass production preparation in just 5 months, and the etching uniformity index was completely on par with their original 6-inch (150mm) production line benchmark.

FAQ

Q1: Can a used AMAT Centura DPS run on 12-inch (300mm) wafers?
Can’t figure it out. The Centura platform was born specifically designed for wafers 8 inches and smaller. If you want to get 300mm, you have to go to Centura AP or Producer platform.

Q2: Is the etching rate of the refurbished DPS+ different from that of the new opportunity?
As long as both the RF matching system and the vacuum pump are restored to the original factory parameters, the etching rate is exactly the same. The performance differences you usually see are basically due to process recipe (Recipe) optimization, which has little to do with the old or new hardware.

Q3: How to solve the problem of spare parts when encountering Centura discontinued model?
Don’t worry about this, Centura’s “Second Source (Second Source)” market is very mature. For consumables such as ceramic dome, lining plates, and sealing rings, third-party spare parts are not only in stock but also much more expensive than the original ones.

Q4: Order a completely refurbished DPS device. How long will the delivery period be?
You have to wait 12 to 18 months to buy a new machine, but if you find a professional refurbisher to get a Centura DPS, it usually only takes 4 to 6 months from shipping, installation and completion of factory verification (Qual).

Q5: Can the DPS platform be used to etch silicon carbide (SiC)?
No problem at all. In the field of power electronics, DPS chambers are often used for SiC etching. Provided that the machine table is equipped with a corresponding high-durability chamber liner to resist the special chemical gases required when handling such hard materials.

Q6: Choose a second-hand Centura. Are there any special software versions for the machine?
Try to keep an eye on software versions with B5 or higher architectures. It is best compatible with modern wafer fab automation systems and SECS/GEM protocols, and will be much less troublesome to connect in the later stage.

Q7: Can I mix and match different types of chambers on the same Centura mainframe?
Yes, modularity is one of Centura’s biggest selling points. As long as the gas cabinet (Gas Box) is configured correctly, you can hang a DPS chamber on one side for polysilicon etching and a heart-shaped chamber (Heart-shaped chamber) on the other side for oxide etching on the same main frame without delaying each other.