Applied Materials 300mm Endura: Wafer Dimensions and Components Guide

Relationship between application materials and Endura platform

In the semiconductor equipment industry, people usually refer to Applied Materials (Applied Materials) simply as its stock code ——AMAT. Endura is a very classic PVD (physical vapor deposition) platform under Applied Materials, which mainly relies on solid targets as the deposition material source. The main purpose of doing this kind of work is to complete the deposition of metals and related thin films, such as metallization covering, aluminum-copper interconnection, or encapsulation of some metal layers. It should be noted here that “AMAT equipment” is actually a very broad general term and cannot refer to a specific model. To accurately identify a device, you need to honestly combine the process category, platform, and specific chamber.

“300mm” Specific meaning in the context of Endura

In wafer manufacturing jargon, the “300mm” corresponds to the 12-inch wafer we are familiar with. Currently, a large portion of the public information on the Endura platform that you can find on the market is for 150mm (6-inch) and 200mm (8-inch) PVD applications. The information will describe that it can be equipped with up to 9 process chambers, which may also include two pre-cleaning chambers. However, if we look at the early records, the old Endura 5500 is actually defined as a modular, single-unit multi-chamber platform that can not only handle ultra-high vacuum PVD, but also conventional high vacuum CVD and etching processes.

Because the factory often mixes equipment from different eras, when you hear the terms Endura 5500, Endura II, Endura HP, Endura TXZ, and 300mm, they often refer to completely different hardware eras, platform versions, or chamber configurations. Only by obtaining the specific system model, wafer size, chamber name, and hardware version number can you truly position the device correctly.

Location of 300mm parts in customer product catalogs

When looking at product catalogs, wafer size is definitely a core identification tag. Taking the customer product catalog of Wuxi Zhanshuo (Wuxi Zhanshuo) as an example, it contains a total of 285 original parts records, of which 281 have their own unique material numbers. Here, PVD-related accessories make up the majority, and “Endura 5500 PVD” is the platform name that appears most frequently.

Interestingly, most of the records in the catalog that clearly carry the word “300mm” actually end up in etching and CVD-related accessories, such as the chamber liner, cathode liner, and slit valve of the 300mm EMAX. Judging from the product introduction of this company, they currently cover three major directions: 6 inches, 8 inches and 12 inches. Specifically for the 12-inch direction, the list includes the AMAT Xgen 300’s panel (faceplate) and adapter, the HDP CVD’s air ring, and the Endura II TXZ 300’s water tank and blocker (blocker). This actually illustrates a problem: accessories with “300mm” and “Endura” labels are not universal on a single platform and must be confirmed one by one in conjunction with the specific chamber.

How to accurately identify AMAT Endura 300mm related accessories

When purchasing materials, if you rely solely on the words “amat endura 300mm” to search, it is often difficult to find the right one at a time. It is impossible to accurately match the name of a platform alone. Especially when encountering product lines that appear on both 200mm and 300mm devices, the first step should be to check its wafer size, host interface, robot (robot), and loading lock (load lock) configuration. Remember, even if the names are exactly the same, they cannot be used as a substitute.

When actually purchasing Endura accessories, it is strongly recommended that you check them one by one according to these dimensions: platform, main unit, process chamber, process kit (process kit), wafer size, material number, and version number (revision level). When inquiring, be sure to include the exact target quantity and quantity required. If conditions permit, it is best to include photos of the actual product, design documents, or even samples. One point to emphasize is that do not miss the letters or suffixes following the material number, as the version information is almost not correct.

Conclusion

Wuxi Zhanshuo Technology Co., Ltd. has always focused on the research and development and manufacturing of semiconductor equipment components, and also receives refurbishment and after-sales service for related equipment. To accurately identify and buy the right parts, the prerequisite is to thoroughly understand the boundaries of the “300mm” in the Endura platform. If you happen to have Endura-related component needs, as long as you provide complete material numbers and platform information, we can help you make the most accurate confirmation by combining the process configuration of the equipment.