Amat Endura 2: What It Is and How to Identify It

A friend who purchases spare parts for semiconductor equipment, or who frequently comes into contact with used equipment, is definitely familiar with the term “amat endura 2”. When many people are looking for something, they tend to confuse the names Endura 5500, Endura HP, and Endura TXZ, thinking that they are all from the same series anyway and can call them whatever they want. But this is actually a big misunderstanding. They represent specific models of applied materials (Applied Materials) introduced in different eras and for different configurations. Today, let’s put aside those rigid manuals and talk about what this platform is all about from the perspective of actual procurement and adaptation, as well as how to prevent pitfalls when buying accessories.

What exactly is Endura?

Let’s start with the big concept. Endura is a PVD (Physical Vapor Deposition) platform with a well-known application material. Its main tasks are “making metal films” ——such as metallization of the front section, aluminum-copper interconnection, and metallization under the bumps in the package. The most powerful thing about it is that it can fully plug pre-cleaning and several steps of metal deposition into a vacuum environment without breaking the vacuum in the middle. However, the platform is the platform. The specific craftsmanship of a machine depends on what cavity is hung on it. Just by listening to the name “Endura”, it is impossible to determine its specific scope of craftsmanship.

How are multiple cavities built?

This multi-cavity device is like a Transformer. The base is the basic platform, the robot transmission system is in the middle, and the loading lock (Load lock) and a bunch of process cavities are hung on the periphery, plus a vacuum and control system. According to official statements, the Endura platform can accommodate up to 9 process chambers (including two pre-cleaning chambers). But please note that what is said here is “at most” that the second-hand equipment you buy or the current aircraft on site are most likely to have different configurations than this upper limit. Don’t read from a script.

Don’t confuse models

The amat endura 2 and amat endura ii often mentioned in the circle are actually two ways of writing the same old platform. If you add the full name of the manufacturer’s brand, it is applied materials endura 2. But this thing is definitely not the same as the Endura 5500, Endura HP or TXZ, which each have their own hardware version. If you want to find out whether two parts can be interchanged, just looking at the name is useless. You must compare the specific system model, wafer size (such as 8 inches or 12 inches), cavity name and even hardware version number. Nine times out of ten, you will have to buy the wrong name for a hard set.

Finding documents can’t be relied upon alone “name registration”

The biggest taboo when buying accessories is to just throw one sentence at the supplier “I want parts for Endura 2”. It’s like going to auto parts and buying a piece and just saying “I want Volkswagen brake pads” it’s unreliable.

When buying parts for this type of machine, you must make a habit of “checking your account”: platform, main unit, cavity type, process kit (Process Kit), wafer size, specific material number (Part Number) and version number (Revision), no one should be missing. If you are buying a refurbished or modified device, it is best to write down the device nameplate, physical photos, interface size, and even the control software version. Another point is very critical. When inquiring about the price, you must ask the supply status clearly: is it a brand new part, a cleaned part, a repaired part or a refurbished part? These types of prices, life and warranty are completely different things and should never be discussed in the same way.

The realistic threshold for replacement of old equipment

In addition, the Endura II is, after all, a historical model with a certain age. The performance indicators in the original factory manual back then are not realistic. If you are looking for a third-party replacement, don’t put it on just because it looks like you. You have to look at the key dimensions and the tight fit of the vacuum interface, and the materials, surface treatment, cleanliness, temperature resistance and chemical compatibility also have to be verified one by one. There is no nameplate and technical configuration single pocket bottom, any promise “including your compatibility” can just be listened to, don’t take it lightly.

On the selection of indigenous suppliers

When talking about finding accessories, let me finally mention our domestic supplier resources. For example, Wuxi Zhanshuo Technology is engaged in the research and development, manufacturing and equipment refurbishment of such semiconductor equipment components. Like the Endura 5500, Centura 5200 and some parts of the P5000 that everyone often looks for, they are all covered. For 12-inch machines, their catalog also includes the Endura II TXZ 300 water box and baffle components.

However, veterans know that catalog coverage does not equate to having stock in stock at any time in the warehouse. If you happen to have accessories needs for amat endura 2, when you ask them for a price, it is best to directly report the material number and quantity. It is best to attach photos of old parts and equipment nameplates. This is the fastest way to check. If you can do it or it is not within the supply range, you can get an accurate answer immediately.