AMAT Centura DPS: How to Verify Parts Compatibility

Get the 1 old cavity parts, only Centura or DPS on the label, is not suitable for immediate inquiry by this name. Centura is a series of multi-cavity platforms. The same platform can carry different processes such as etching, CVD, epitaxy and heat treatment. DPS is the abbreviation of Decoupled Plasma Source, which is in the context of plasma source and etching cavity, and is not another name of Centura host.

This is also where amat centura dps is prone to mismatches: the 3 word narrows the scope, but does not yet lock the specific cavity and parts.

First, clearly distinguish the process branches of DPS

Only looking at the word DPS, it is impossible to judge whether the component comes from silicon etching, metal etching or a subsequent version. Historical products include both Silicon Etch DPS Centura and Metal Etch DPS Centura;DPS Plus is another 1 product generation. The name is close to, not equal to the cavity body, lining, ring or interface can be interchanged.

In actual verification, first find the complete name from the equipment nameplate, cavity nameplate or configuration file. Whether DPS Metal, DPS Poly, or DPS Poly is written in the record, this difference must be retained. In the customer product record, item 0040-02544 corresponds to DPS Metal upper cavity, 0021-09625 and 0021-36743 corresponds to DPS Poly lower cavity, and 0020-33806 corresponds to DPS Poly upper cavity. They all carry DPS, but cannot be combined into a universal cavity.

Wafer size cannot be left for final confirmation

Centura and associated host architectures span different generations and wafer sizes. The configuration contexts of 150mm, 200 mm and 300 mm can be seen in the public product information. Historically, there are also DPS products matching Centura 300 platforms. When the same product family appears in different wafer sizes, the host interface, the robot, the load lock, and the inside of the cavity may all be different.

Therefore, when you see "DPS ring" or "DPS chamber", first confirm the wafer size that the target device is handling. 0200-36691 in the product record is marked as 150mm, Centura 5200 DPS Poly ring; 0200-10377 has 195 mm and DPS chamber limit. If these descriptions are ignored and only compared by part shape or DPS name, it is easy to put the candidate in the wrong size and cavity version.

Let the material and revision complete the final confirmation

The platform, process branch, and wafer size are only responsible for narrowing the range, and ultimately still return to the full number. Before the inquiry, all digits, REV marks, version letters and suffixes of the material number shall be reserved, and the assembly position of the parts in the cavity shall be recorded. When the label of the old part can be read clearly, take the label as the starting point; When the label is missing or worn, cross-check with the photos of the now-installed parts, the interface size, the item number of the superior component, the bill of materials and the assembly drawing, and do not guess the missing characters by yourself.

Historical equipment in particular depends on the current state. After a chamber upgrade, platform modification, or control system replacement, the factory name may no longer represent the current hardware. At this time, the serial number of the equipment, the name of the existing cavity, the modification record and the current configuration file should be checked together, instead of placing an order based on the 1 old manual.

Don't assume compatibility based solely on component names

The names of upper chamber, lower chamber, focus ring, ESC, blade, etc. describe the type or location of the part, not the unique identity. Parts with the same name may correspond to different materials, critical dimensions, vacuum interfaces, surface treatments, and hardware revisions. Even if it can be loaded mechanically, it cannot be judged that it meets the vacuum, temperature, chemical environment, particles and pollution requirements of the target cavity.

For example, there are not only DPS Metal upper cavity, DPS Poly lower cavity and DPS Poly upper cavity in the customer record, but also Focus Ring Ceramic DPS, DPS ESC, and blade marked for Centura 5200 DPS Poly. When purchasing, it is necessary to first determine whether the required components are located in the platform common system, transmission system, or inside the specific process chamber, and then check the correspondence between it and the target configuration.

Include the supply status in the acceptance criteria

New, cleaned, serviced, refurbished and replacement parts are not in the same delivery state. The RFQ shall specify the target status and require that the inspection records can be linked to specific items, revisions, batches and quantities. When alternatives are involved, compare critical dimensions, materials, surface treatments, vacuum interfaces, temperature ranges, chemical compatibility, and particle and contamination requirements; similar appearance or similar description is not sufficient to justify equivalence.

Before preparing to place an order, complete at least the host generation, etching branch, DPS or DPS Plus, wafer size, complete item number and revision. Any item still depends on speculation, should first go back to the existing hardware and the official configuration file to continue to confirm.