Used Semiconductor Processing Equipment

Chinsor Tech provides selection, modification and complete machine renovation services for high-quality used semiconductor processing equipment, covering 8-inch chemical vapor deposition and supporting core epitaxial components. As a source manufacturer of semiconductor key components with independent production lines and core technology assets, Chinsor Tech is able to directly interface with terminal procurement, avoid traders’ layer-by-layer price increase, and ensure a full range of machine upgrades with more competitive ex-factory prices and rapid supply chain response.

8 inches Wafer size

chemical vapor deposition Process chamber

micro-torr per second less than 1 negative ninth power Cavity leakage rate

plus or minus 0.5 degrees Celsius Temperature control accuracy

positive and negative 1% Heating uniform

plus or minus 0.005mm Mechanical tolerance

5000/5200 WXZ CHAMBER Compatible platform

International Organization for Standardization Nine Thousand One Quality Management

fully comply with the original factory level mechanical interface Manufacturing standards

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used semiconductor processing equipment（images 1）

Our products

The used semiconductor processing equipment of this class is mainly applied to the characteristic process expansion of small and medium-sized integrated circuit manufacturing plants, the construction of micro-nano manufacturing test lines for semiconductor start-ups, the upgrading of thin film deposition machines for old production lines, and the epitaxial growth and development of non-standard materials in scientific research institutions.

used semiconductor processing equipment Features

Seamless compatible adaptation of original factory-level dimensions:

providing used semiconductor processing equipment optimized by precision surveying and mapping and engineering. Its critical mechanical dimensions and electrical interface tolerances are stable within plus or minus 0.005mm, ensuring that refurb machines can be seamlessly integrated into existing production lines.

Reconstruction of cavity function of independent patent technology:

relying on 52 independent patents owned by the enterprise, the body Hdp-cvd cavity body, the core Chamber of used semiconductor processing equipment, is deeply renovated, the static leakage rate reaches the level of 1 minus ninth power, and the chemical vapor deposition performance of the machine platform is restored and improved.

High-purity ceramic component replacement pollution control:

in the used semiconductor processing equipment key process contact surface, the comprehensive replacement of alumina ceramic epitaxial components with purity greater than 99.7%, from the source to prevent heavy metal ions on the wafer cross-contamination.

Multi-zone independent temperature control improves film yield:

advanced multi-zone independent temperature control heating module is configured for upgrading used semiconductor processing equipment. Under the normal process of 400 degrees Celsius, the temperature unevenness is controlled within the positive and negative 1%, and the uniformity of the film deposition thickness is significantly improved.

Source spare parts guarantee relieves the worries of supply interruption:

due to its independent precision metal and brittle material processing line, Chinsor Tech can provide long-term replacement parts support for the sold used semiconductor processing equipment, and solve the risk of machine shutdown caused by the shutdown of the original factory.

High-standard cross-border trade compliance system:

all used semiconductor processing equipment and supporting transformation components have passed strict export compliance review. The company has rich experience in large-scale project delivery, and its products have been successfully sold to the core semiconductor markets such as the United States, Japan, Korea, Malaysia and New Korea.

Detailed Structural Parameter Table of Used Semiconductor Processing Equipment

Parameter categories	Detailed parameter items	Industry standards and engineering specifications
Machine and process configuration	Equipment main process classification	8-inch integrated circuit thin film vapor deposition used semiconductor processing equipment
	Core gas path components	Supports customized production of high-purity vapor deposition gas path control units such as China Gas Box and WCVD.
	Applicable technology platform	Compatible with mainstream 5000/5200 WXZ CHAMBER and its series systems
Vacuum and thermal properties	static leak rate of reaction chamber	Less than 1 – 9 lifts per second (for Chamber Body Hdp-cvd)
	Process temperature range	100 degrees Celsius to 650 degrees Celsius
	Wafer surface temperature difference	Axial and radial thermal uniformity better than ±1%.
Mechanical and Material Precision	Machining tolerances of core components	±0.005 millimeters
	Cleanroom cleaning standards	Semiconductor-grade high-purity isopropanol ultrasonic cleaning and vacuum baking degassing
	Structural material purity	The internal impurity content of structural metal and ceramic parts is less than 300 parts per million.
Intellectual Property and Compliance	Manufacturing plant qualification certification	International Organization for Standardization (ISO) 91000 Quality System Certification
	Independent technology asset endorsement	It holds 52 patents and 11 software copyrights.

used semiconductor processing equipment contrast point

The used semiconductor processing equipment provided by Chinsor Tech is not a simple resale of second-hand disassembled parts, but relies on the deep film deposition, heating components and independent manufacturing technology of the source factory to reconstruct the bottom layer of the equipment in all directions. Compared to ordinary traders, Chinsor Tech is able to ensure that the machine meets the original factory-level process targets, while relying on strong local manufacturing flexibility, customized structural improvements for customers’ specific non-standard processes, and the overall delivery cycle can be reduced by half.

Stagnation of original technical support for second-hand equipment:

Chinsor Tech has established an uninterrupted replacement spare parts library for used semiconductor processing equipment, solving the pain point of machine scrapping faced by small and medium-sized enterprises after the original factory announced the suspension of equipment or technical support.

The internal pollution of conventional second-hand complete machines is serious:

Chinsor Tech has thoroughly cleaned and ground the under-performing cavity and upgraded high-purity semiconductor-grade ceramic parts in an all-round way, thus solving the pain point that second-hand equipment is easy to release particles after long-term operation and causing large-area pollution of wafer wafers.

The imbalance of the thermal field of the old machine affects the output:

Chinsor Tech has replaced the independently developed high-uniformity heating base for the used semiconductor processing equipment, which solves the pain points of uneven film deposition thickness and low yield caused by the aging of the heating module of the old machine.

used semiconductor processing equipment applicable crowd

Small and medium-sized power semiconductor wafer fabrication plants:

for purchasing directors who are in urgent need of rapid capacity expansion and additional specialty process lines within a limited capital expenditure budget. This used semiconductor processing equipment can meet its 8-inch thin film deposition process requirements with a very high return on investment.

used semiconductor processing equipment applicable crowd

Emerging IC and chip start-ups:

for supply chain leaders who have just established a process route and are in the sample proofing and small batch trial production stages. This product can help start-ups avoid the high cost and long delivery time of purchasing new equipment, and realize the rapid construction of wire body and product production.

Third-party semiconductor equipment repair and remanufacturer:

For technology-based companies that specialize in recycling, refurbishing and resale used equipment. This group can directly purchase the cavity upgrade module and precision spare parts of this product when rebuilding the function of the complex used semiconductor processing equipment.

College of microelectronics and scientific research institutes of colleges and universities:

a laboratory platform suitable for teaching and scientific research on micro-nano electronic devices, advanced semiconductor materials epitaxial growth and micro-processing technology. The product can not only provide the original factory-level process environment, but also has a high degree of flexibility, perfect fit non-standard scientific research needs.

used semiconductor processing equipment instructions

Machine docking and secondary cleaning:

disassemble the external protection assembly of the used semiconductor processing equipment in a thousand-level clean room environment, and use semiconductor-level high-purity isopropyl alcohol to finely wipe the inside of the cavity to completely eliminate trace mechanical particles that may be generated during transportation.

Mechanical leveling and pipeline connection:

use a precision level to adjust the used semiconductor processing equipment to the process level line, and connect the special process gas pipeline and vacuum exhaust pipeline according to the original factory-level interface standard to ensure that the gasket at the interface is evenly stressed.

System vacuuming and thermal baking degassing:

start the matching dry pump and molecular pump group to pump the reaction chamber to the working vacuum degree, and at the same time turn on the heating system to 150 degrees Celsius to maintain a high temperature vacuum baking for at least four hours to completely discharge the trace moisture and gas adsorbed on the inner wall of the chamber.

Standard piece test run and film uniformity test:

Before the official production, the test wafer is introduced for the standard process test run of thin film chemical vapor deposition. The thickness of the film was measured using ellipsometer and other testing equipment, and the multi-zone temperature control parameters were fine-tuned until the wafer surface uniformity reached the design target.

factory and certificate

certificate

FAQ And Contact Us

Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.

Q: Does the used semiconductor processing equipment you provide include the warranty and follow-up technical support?

A: Yes. As the source manufacturer, we not only provide the whole machine function warranty for the second-hand equipment sold, but also provide long-term uninterrupted supply of spare parts and lifelong technical support because we independently own the key manufacturing technologies of thin film deposition and vacuum chamber.

Q: Start-ups buy your second-hand processing equipment, in the process formula can get support?

A: Yes. Our technical team has deep technical accumulation in key process links such as 8-inch chemical vapor deposition and PVD wafer heating. We can customize and fine-tune the gas circuit and thermal field of the equipment according to the customer’s specific chip process requirements.

Q: How to ensure that the mechanical precision and vacuum degree of these used semiconductor processing equipment reach the production standard?

A: Each equipment will go through the same precise testing process as the whole new products before leaving the factory. Through the reconstruction and grinding of micron-level CNC machine tools, the static leakage rate of the cavity is strictly controlled at the level of 1 minus ninth power to ensure that the mechanical assembly tolerance reaches the original factory-level index.

Q: Can you provide a separate upgrade service for the core process chamber of second-hand equipment?

A: Yes. If your existing used semiconductor processing equipment has cavity aging or needs to be converted, we can provide you with the replacement service of Chamber Body Hdp-cvd cavity upgrade, structural improvement or special material spare parts according to the 52 patented technologies we hold.

Q: How long will the delivery cycle take to purchase second-hand semiconductor processing equipment from you?

A: Since we are the source factory, we have removed the middleman transfer link, and there are always semi-finished products of core metal processing parts and ceramic epitaxial components in the factory. After determining the technical change plan, we can complete the assembly and commissioning in a very short time, and the delivery time is much faster than overseas procurement.

Q: Apart from the whole machine and cavity, can Chinsor Tech supply China Gas Box, Wcvd related components for second-hand gas path control?

A: Yes. We have a deep independent manufacturing technology of epitaxial components and spare parts for vapor deposition. We can manufacture high-specification gas boxes and key components for process gas control according to process standards to ensure the absolute purity of gas path transportation after second-hand processing equipment is put back on line.

Please feel free to contact us. We look forward to hearing from you.

Used Semiconductor Processing Equipment

Chinsor Tech provides selection, modification and complete machine renovation services for high-quality used semiconductor processing equipment, covering 8-inch chemical vapor deposition and supporting core epitaxial components. As a source manufacturer of semiconductor key components with independent production lines and core technology assets, Chinsor Tech is able to directly interface with terminal procurement, avoid traders’ layer-by-layer price increase, and ensure a full range of machine upgrades with more competitive ex-factory prices and rapid supply chain response.

8 inches

Wafer size

chemical vapor deposition

Process chamber

micro-torr per second less than 1 negative ninth power

Cavity leakage rate

Get a Quote

used semiconductor processing equipment Features

Seamless compatible adaptation of original factory-level dimensions:

providing used semiconductor processing equipment optimized by precision surveying and mapping and engineering. Its critical mechanical dimensions and electrical interface tolerances are stable within plus or minus 0.005mm, ensuring that refurb machines can be seamlessly integrated into existing production lines.

Reconstruction of cavity function of independent patent technology:

relying on 52 independent patents owned by the enterprise, the body Hdp-cvd cavity body, the core Chamber of used semiconductor processing equipment, is deeply renovated, the static leakage rate reaches the level of 1 minus ninth power, and the chemical vapor deposition performance of the machine platform is restored and improved.

High-purity ceramic component replacement pollution control:

in the used semiconductor processing equipment key process contact surface, the comprehensive replacement of alumina ceramic epitaxial components with purity greater than 99.7%, from the source to prevent heavy metal ions on the wafer cross-contamination.

Multi-zone independent temperature control improves film yield:

advanced multi-zone independent temperature control heating module is configured for upgrading used semiconductor processing equipment. Under the normal process of 400 degrees Celsius, the temperature unevenness is controlled within the positive and negative 1%, and the uniformity of the film deposition thickness is significantly improved.

Source spare parts guarantee relieves the worries of supply interruption:

due to its independent precision metal and brittle material processing line, Chinsor Tech can provide long-term replacement parts support for the sold used semiconductor processing equipment, and solve the risk of machine shutdown caused by the shutdown of the original factory.

High-standard cross-border trade compliance system:

all used semiconductor processing equipment and supporting transformation components have passed strict export compliance review. The company has rich experience in large-scale project delivery, and its products have been successfully sold to the core semiconductor markets such as the United States, Japan, Korea, Malaysia and New Korea.

Detailed Structural Parameter Table of Used Semiconductor Processing Equipment

Parameter categories	Detailed parameter items	Industry standards and engineering specifications
Machine and process configuration	Equipment main process classification	8-inch integrated circuit thin film vapor deposition used semiconductor processing equipment
	Core gas path components	Supports customized production of high-purity vapor deposition gas path control units such as China Gas Box and WCVD.
	Applicable technology platform	Compatible with mainstream 5000/5200 WXZ CHAMBER and its series systems
Vacuum and thermal properties	static leak rate of reaction chamber	Less than 1 – 9 lifts per second (for Chamber Body Hdp-cvd)
	Process temperature range	100 degrees Celsius to 650 degrees Celsius
	Wafer surface temperature difference	Axial and radial thermal uniformity better than ±1%.
Mechanical and Material Precision	Machining tolerances of core components	±0.005 millimeters
	Cleanroom cleaning standards	Semiconductor-grade high-purity isopropanol ultrasonic cleaning and vacuum baking degassing
	Structural material purity	The internal impurity content of structural metal and ceramic parts is less than 300 parts per million.
Intellectual Property and Compliance	Manufacturing plant qualification certification	International Organization for Standardization (ISO) 91000 Quality System Certification
	Independent technology asset endorsement	It holds 52 patents and 11 software copyrights.

used semiconductor processing equipment contrast point

used semiconductor processing equipment（images 8）

Stagnation of original technical support for second-hand equipment:

Chinsor Tech has established an uninterrupted replacement spare parts library for used semiconductor processing equipment, solving the pain point of machine scrapping faced by small and medium-sized enterprises after the original factory announced the suspension of equipment or technical support.

The internal pollution of conventional second-hand complete machines is serious:

Chinsor Tech has thoroughly cleaned and ground the under-performing cavity and upgraded high-purity semiconductor-grade ceramic parts in an all-round way, thus solving the pain point that second-hand equipment is easy to release particles after long-term operation and causing large-area pollution of wafer wafers.

The imbalance of the thermal field of the old machine affects the output:

Chinsor Tech has replaced the independently developed high-uniformity heating base for the used semiconductor processing equipment, which solves the pain points of uneven film deposition thickness and low yield caused by the aging of the heating module of the old machine.

used semiconductor processing equipment applicable crowd

Small and medium-sized power semiconductor wafer fabrication plants:

for purchasing directors who are in urgent need of rapid capacity expansion and additional specialty process lines within a limited capital expenditure budget. This used semiconductor processing equipment can meet its 8-inch thin film deposition process requirements with a very high return on investment.

Emerging IC and chip start-ups:

for supply chain leaders who have just established a process route and are in the sample proofing and small batch trial production stages. This product can help start-ups avoid the high cost and long delivery time of purchasing new equipment, and realize the rapid construction of wire body and product production.

Third-party semiconductor equipment repair and remanufacturer:

For technology-based companies that specialize in recycling, refurbishing and resale used equipment. This group can directly purchase the cavity upgrade module and precision spare parts of this product when rebuilding the function of the complex used semiconductor processing equipment.

College of microelectronics and scientific research institutes of colleges and universities:

a laboratory platform suitable for teaching and scientific research on micro-nano electronic devices, advanced semiconductor materials epitaxial growth and micro-processing technology. The product can not only provide the original factory-level process environment, but also has a high degree of flexibility, perfect fit non-standard scientific research needs.

used semiconductor processing equipment instructions

Machine docking and secondary cleaning:

disassemble the external protection assembly of the used semiconductor processing equipment in a thousand-level clean room environment, and use semiconductor-level high-purity isopropyl alcohol to finely wipe the inside of the cavity to completely eliminate trace mechanical particles that may be generated during transportation.

Mechanical leveling and pipeline connection:

use a precision level to adjust the used semiconductor processing equipment to the process level line, and connect the special process gas pipeline and vacuum exhaust pipeline according to the original factory-level interface standard to ensure that the gasket at the interface is evenly stressed.

System vacuuming and thermal baking degassing:

start the matching dry pump and molecular pump group to pump the reaction chamber to the working vacuum degree, and at the same time turn on the heating system to 150 degrees Celsius to maintain a high temperature vacuum baking for at least four hours to completely discharge the trace moisture and gas adsorbed on the inner wall of the chamber.

Standard piece test run and film uniformity test:

Before the official production, the test wafer is introduced for the standard process test run of thin film chemical vapor deposition. The thickness of the film was measured using ellipsometer and other testing equipment, and the multi-zone temperature control parameters were fine-tuned until the wafer surface uniformity reached the design target.

Know Us and Contact Us

Get a Free Quote Today.

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