Used Semiconductor Parts | 0020-75851

Chinsor Tech is committed to providing high-performance used semiconductor components that have undergone rigorous refurbishment, cleaning and precision testing for mature process machines to help fabs effectively manage the risk of machine shutdown. As a source manufacturing plant for semiconductor components, Chinsor Tech has independent research and development and re-processing capabilities, non-intermediate traders, and can directly provide competitive ex-factory prices, fast spot delivery and comprehensive original-level technical foundry guarantee.

99.99% Material purity

0.01mm Mechanical tolerance

0.2 microns Surface roughness

1.0E-9 Vacuum leakage rate

less than 10 Granularity control

1000 degrees Celsius Applicable temperature

100 megohm Insulation resistance

90% of the original factory Service life

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Our products

Second-hand semiconductor components are mainly used in the refurbishment of film deposition equipment in mature integrated circuit production lines, thermal field mechanism upgrades of physical vapor deposition equipment, sealing maintenance of high vacuum reaction chambers, and replacement of wafer transfer machine loss parts.

used semiconductor parts Features

Precision repair technology to restore size:

using unique surface remelting and ultra-precision machining technology, the key installation position tolerance of used spare parts is restored to 0.01mm, eliminating particle pollution of production line caused by loose fit caused by mechanical wear.

High-quality cleaning process eliminates contamination:

The parts undergo strict 5-level ultrasonic cleaning and chemical decontamination procedures to completely remove metal ions and residual process gases attached to the surface, reducing the cross-contamination rate in wafer manufacturing by more than 98%.

Vacuum side leakage ensures cavity sealing:

each second-hand vacuum cavity component is tested for leakage rate by helium mass spectrometer leak detector to ensure that the leakage rate is controlled at a very low standard and to prevent wafer scrapping caused by process vacuum failure due to leakage.

Strict electrical testing ensures stability:

full power load aging test is carried out on second-hand components containing heaters and sensor mechanisms to ensure that the insulation resistance value and temperature control accuracy meet the original factory performance standards under continuous operation at 1000 degrees Celsius.

Double-layer anti-static clean room packaging:

all used parts that have passed the test are finally purged with nitrogen in the 100-level clean room, and sealed with double-layer anti-static vacuum film to prevent secondary pollution during transportation and storage.

Cost-effective to ease the budget pressure:

under the premise of providing the same performance indicators as the original new products, the procurement cost is only 30% to 50% of the new components, effectively helping customers reduce the operating expenses and comprehensive maintenance costs of mature process production lines.

Detailed structural parameters of used semiconductor parts

Parameter name	Specification data	Test Standards/Remarks
Application device type	Vapor deposition/plasma etching/epitaxy equipment	6-inch and 8-inch integrated circuit production lines
Basic material composition	Precision alloys/high-purity alumina ceramics/quartz	Provided according to the specific chemical environment of the reaction chamber
Refurbishment dimensional accuracy	±0.01 mm	Restore original dimensions through precision machining
Cleaning and cleanliness standards	Particle size less than or equal to 10 particles of 0.3 micrometers	Laser particle counting detection before encapsulation in a Class 100 cleanroom
Tolerating working vacuum	Greater than 0.0000001 Pa	Meets the operating environment requirements of ultra-high vacuum chambers
Insulation withstand voltage index	Greater than 15 kV per millimeter	Suitable for plasma strong electric field environments
Factory testing system	Coordinate measuring machine / Helium vacuum leak detection / Thermal field testing	Each spare part comes with a complete performance quality inspection report.
Quality Management Qualification	ISO 9001 certification	Physical source factory full-process manufacturing and testing control

Comparison points for used semiconductor parts

Leveraging its deep technological expertise in the manufacturing of precision semiconductor components, Chinsor Tech has redefined performance standards for used semiconductor parts. While most secondhand equipment dealers offer only cosmetic cleaning and basic model verification, Chinsor Tech performs in-depth mechanical reconditioning, flow‑path optimization, and surface‑material modification on worn or degraded core components such as chambers and heaters, bringing the performance of its remanufactured used parts—on critical metrics like corrosion resistance and thermal‑field uniformity—close to, or even up to, that of new parts. We leverage a comprehensive cleanroom cleaning line and an ultra-high vacuum testing platform to subject each spare part to quality traceability management as stringent as that of the original manufacturer. As an original‑source manufacturer, Chinsor Tech not only maintains substantial ready‑stock inventories to address urgent downtime needs, but also offers contract manufacturing for structural modifications of non‑standard used spare parts, tailored to the actual evolution of wafer fab production lines. In particular, for major overhauls of the 5000/5200 WXZ CHAMBER classic‑generation platform, as well as vacuum‑chamber structural repairs and component upgrades, we boast extensive hands‑on retrofit experience. We can ensure original‑equipment compatibility while delivering superior wear resistance and highly competitive factory‑direct pricing to customers worldwide.

The production of original spare parts leads to the elimination of the machine:

mature production line machines are often unable to obtain new spare parts due to the suspension of technical support by the original factory. By providing highly reliable refurbished parts, we can effectively extend the operating life of old equipment by more than 5 years.

Vacuum leakage caused by blind assembly of non-standard second-hand parts:

in view of the pain points that the sealing surface of bulk old parts in the market is oxidized and deformed, and the reaction chamber cannot be vacuumed after installation, we have implemented comprehensive precision polishing and helium mass spectrometry side leakage to ensure the success of one-time sealing on the machine.

Unknown second-hand channels cause wafer metal contamination:

In view of the risk of excessive metal impurities and large-area wafer contamination caused by the purchase of non-qualified second-hand spare parts, we have established strict chemical cleaning specifications to completely remove the residual heavy metals in the deep layers of the components.

Used semiconductor parts for people

Maintenance and Asset Management Manager of Mature Wafer Fabs:

Applicable to technical purchasing supervisors of integrated circuit factories who are mainly responsible for the utilization rate of mature process line equipment such as 6-inch or 8-inch, while facing strict operating cost control and the crisis of shutdown and supply of old spare parts. This group needs to purchase quality-certified second-hand spare parts from physical source factories with manufacturing and testing capabilities. When facing the damage of the sealing surface of the old Chamber Body and Dxz due to long-term plasma etching wear, seeking high-precision mechanical repair or one-to-one part replacement is an economical choice to ensure the rapid resumption of production lines.

Semiconductor equipment refurbishment and remanufacturing engineers:

third-party refurbishment enterprise technical experts who specialize in recycling, refurbishing and re-selling all types of mainstream semiconductor platforms. This part of the user in the system-level reconstruction of the old equipment, the need for a large number of good quality, dimensional tolerances fully compliant metal cavity parts and ceramic insulation parts as the basic replacement materials.

Second-line technical support team for power and facilities in fab:

applicable to the technical team in the fab responsible for routine inspection and overhaul of vacuum pump system, gas distribution cabinet and peripheral transmission mechanism. Faced with extremely fast consumption of valve parts, sealing ring fixing seats and precision joints of transfer manipulators, they need second-hand assemblies with excellent quality and fast delivery to shorten the downtime of daily maintenance.

Semiconductor component research and reverse engineering institutions:

applicable to research teams engaged in domestic alternative research and development of key semiconductor components or material characteristic analysis. These organizations need to purchase second-hand physical objects with typical process usage traces, cooperate with the processing process data of the source manufacturer, conduct thermodynamic structure analysis and comparative experiments on plasma etching resistance behavior.

used semiconductor parts instructions

Clean room unpacking and appearance check:

the product must be in a thousand or higher specifications of the dust-free room open double vacuum packaging. After unpacking, please compare the three-coordinate inspection report with the box to check whether there are minor scratches caused by transportation on the key sealing surface and threaded holes. For the key components of the gas path control, please confirm whether the interior is completely dust-free.

Fit position lubrication and seal installation:

Before installation, use high-purity isopropyl alcohol to wipe the vacuum sealing surface slightly. If a dynamic or static seal is involved, apply a small amount of vacuum fluorogrease that meets the semiconductor process requirements, and then embed the original specification seal ring smoothly. If the fab is facing an emergency overhaul, you can contact us directly to confirm whether there are matching Gas Box Dxz in stock spare parts for installation and reset together with the consumable parts of the production line.

Staggered fastening and mechanical alignment:

smoothly move the parts into the corresponding base of the reaction chamber, use a torque wrench conforming to the industry standard, and gradually apply the torque to the specified value in three times according to the diagonal principle, so as to avoid metal deformation or ceramic brittle fracture caused by excessive force on one side.

Assessment of system-wide evacuation and temperature rise:

lock the cavity after assembly, and start the evacuation procedure to the process standard pressure. Then turn on the heating module, slowly raise the temperature to the rated temperature at a speed of 5 degrees Celsius per minute and keep it for 4 hours, and observe the fluctuation of vacuum degree to confirm zero outgassing under the temperature rise state.

factory and certificate

certificate

FAQ And Contact Us

Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.

Q: Are the sources of used semiconductor components you provide compliant and legal?

A: Yes. All of our used parts are sourced from decommissioned machines recycled through formal channels or from the liquidation of the assets of IC companies. Each 1 incoming product has a clear source record and original model identification to ensure full compliance and traceability of the supply chain channel.

Q: How can we ensure that these used parts will not cause cross contamination to our wafer production lines?

A: We have a professional semiconductor cleaning workshop. After the second-hand parts are reprocessed, they will undergo high-standard purification processes such as strong alkali cleaning, pickling to remove heavy metals, deionized water ultrasonic cleaning, etc., and finally complete particle counting detection in the clean room to ensure a clean state without impurities.

Q: What if the second-hand parts are found to have a size mismatch when installed on the machine?

A: Chinsor Tech uses a precision three-coordinate measuring machine to conduct a full inspection of the mechanical fit tolerance before leaving the factory. As we are a physical factory with independent machining capability, we can quickly provide secondary fine-tuning and restructuring services for returning to the factory in case of small individual differences between the old machines themselves.

Q: Can a used heater or electrical component perform at the level of a new original part?

A: Our refurbishment technology provides a deep repair for core electrical and thermal metrics. Before leaving the factory, continuous high-temperature power-on aging test and thermal field uniformity scanning will be carried out. The core parameters can reach more than 90% of the original new products, meeting the continuous production needs of normal processes.

Q: Do you offer warranty commitments for used semiconductor parts sold?

A: Yes. According to the category of components (such as mechanical metal parts, functional heating parts, precision ceramic parts), we provide physical factory warranty services for different periods. We are responsible for free refurbishment or replacement for performance degradation caused by non-human improper operation during the warranty period.

Q: How to ensure that these vulnerable second-hand parts are intact during cross-border transportation?

A: All spare parts are vacuum sealed in the clean room, and then packaged with anti-static foam. The outer box is made of heavy-duty shockproof wooden box in line with international export standards, and a multi-dimensional shock-absorbing limit structure is installed inside to ensure that the products are not affected with moisture, vibration and pollution during sea and air transportation.

Please feel free to contact us. We look forward to hearing from you.

Used Semiconductor Parts | 0020-75851

Chinsor Tech is committed to providing high-performance used semiconductor components that have undergone rigorous refurbishment, cleaning and precision testing for mature process machines to help fabs effectively manage the risk of machine shutdown. As a source manufacturing plant for semiconductor components, Chinsor Tech has independent research and development and re-processing capabilities, non-intermediate traders, and can directly provide competitive ex-factory prices, fast spot delivery and comprehensive original-level technical foundry guarantee.

99.99%

Material purity

0.01mm

Mechanical tolerance

0.2 microns

Surface roughness

Get a Quote

used semiconductor parts Features

Precision repair technology to restore size:

using unique surface remelting and ultra-precision machining technology, the key installation position tolerance of used spare parts is restored to 0.01mm, eliminating particle pollution of production line caused by loose fit caused by mechanical wear.

High-quality cleaning process eliminates contamination:

The parts undergo strict 5-level ultrasonic cleaning and chemical decontamination procedures to completely remove metal ions and residual process gases attached to the surface, reducing the cross-contamination rate in wafer manufacturing by more than 98%.

Vacuum side leakage ensures cavity sealing:

each second-hand vacuum cavity component is tested for leakage rate by helium mass spectrometer leak detector to ensure that the leakage rate is controlled at a very low standard and to prevent wafer scrapping caused by process vacuum failure due to leakage.

Strict electrical testing ensures stability:

full power load aging test is carried out on second-hand components containing heaters and sensor mechanisms to ensure that the insulation resistance value and temperature control accuracy meet the original factory performance standards under continuous operation at 1000 degrees Celsius.

Double-layer anti-static clean room packaging:

all used parts that have passed the test are finally purged with nitrogen in the 100-level clean room, and sealed with double-layer anti-static vacuum film to prevent secondary pollution during transportation and storage.

Cost-effective to ease the budget pressure:

under the premise of providing the same performance indicators as the original new products, the procurement cost is only 30% to 50% of the new components, effectively helping customers reduce the operating expenses and comprehensive maintenance costs of mature process production lines.

Detailed structural parameters of used semiconductor parts

Parameter name	Specification data	Test Standards/Remarks
Application device type	Vapor deposition/plasma etching/epitaxy equipment	6-inch and 8-inch integrated circuit production lines
Basic material composition	Precision alloys/high-purity alumina ceramics/quartz	Provided according to the specific chemical environment of the reaction chamber
Refurbishment dimensional accuracy	±0.01 mm	Restore original dimensions through precision machining
Cleaning and cleanliness standards	Particle size less than or equal to 10 particles of 0.3 micrometers	Laser particle counting detection before encapsulation in a Class 100 cleanroom
Tolerating working vacuum	Greater than 0.0000001 Pa	Meets the operating environment requirements of ultra-high vacuum chambers
Insulation withstand voltage index	Greater than 15 kV per millimeter	Suitable for plasma strong electric field environments
Factory testing system	Coordinate measuring machine / Helium vacuum leak detection / Thermal field testing	Each spare part comes with a complete performance quality inspection report.
Quality Management Qualification	ISO 9001 certification	Physical source factory full-process manufacturing and testing control

Comparison points for used semiconductor parts

The production of original spare parts leads to the elimination of the machine:

mature production line machines are often unable to obtain new spare parts due to the suspension of technical support by the original factory. By providing highly reliable refurbished parts, we can effectively extend the operating life of old equipment by more than 5 years.

Vacuum leakage caused by blind assembly of non-standard second-hand parts:

in view of the pain points that the sealing surface of bulk old parts in the market is oxidized and deformed, and the reaction chamber cannot be vacuumed after installation, we have implemented comprehensive precision polishing and helium mass spectrometry side leakage to ensure the success of one-time sealing on the machine.

Unknown second-hand channels cause wafer metal contamination:

In view of the risk of excessive metal impurities and large-area wafer contamination caused by the purchase of non-qualified second-hand spare parts, we have established strict chemical cleaning specifications to completely remove the residual heavy metals in the deep layers of the components.

Used semiconductor parts for people

Maintenance and Asset Management Manager of Mature Wafer Fabs:

Applicable to technical purchasing supervisors of integrated circuit factories who are mainly responsible for the utilization rate of mature process line equipment such as 6-inch or 8-inch, while facing strict operating cost control and the crisis of shutdown and supply of old spare parts. This group needs to purchase quality-certified second-hand spare parts from physical source factories with manufacturing and testing capabilities. When facing the damage of the sealing surface of the old Chamber Body and Dxz due to long-term plasma etching wear, seeking high-precision mechanical repair or one-to-one part replacement is an economical choice to ensure the rapid resumption of production lines.

Semiconductor equipment refurbishment and remanufacturing engineers:

third-party refurbishment enterprise technical experts who specialize in recycling, refurbishing and re-selling all types of mainstream semiconductor platforms. This part of the user in the system-level reconstruction of the old equipment, the need for a large number of good quality, dimensional tolerances fully compliant metal cavity parts and ceramic insulation parts as the basic replacement materials.

Second-line technical support team for power and facilities in fab:

applicable to the technical team in the fab responsible for routine inspection and overhaul of vacuum pump system, gas distribution cabinet and peripheral transmission mechanism. Faced with extremely fast consumption of valve parts, sealing ring fixing seats and precision joints of transfer manipulators, they need second-hand assemblies with excellent quality and fast delivery to shorten the downtime of daily maintenance.

Semiconductor component research and reverse engineering institutions:

applicable to research teams engaged in domestic alternative research and development of key semiconductor components or material characteristic analysis. These organizations need to purchase second-hand physical objects with typical process usage traces, cooperate with the processing process data of the source manufacturer, conduct thermodynamic structure analysis and comparative experiments on plasma etching resistance behavior.

used semiconductor parts instructions

Clean room unpacking and appearance check:

the product must be in a thousand or higher specifications of the dust-free room open double vacuum packaging. After unpacking, please compare the three-coordinate inspection report with the box to check whether there are minor scratches caused by transportation on the key sealing surface and threaded holes. For the key components of the gas path control, please confirm whether the interior is completely dust-free.

Fit position lubrication and seal installation:

Before installation, use high-purity isopropyl alcohol to wipe the vacuum sealing surface slightly. If a dynamic or static seal is involved, apply a small amount of vacuum fluorogrease that meets the semiconductor process requirements, and then embed the original specification seal ring smoothly. If the fab is facing an emergency overhaul, you can contact us directly to confirm whether there are matching Gas Box Dxz in stock spare parts for installation and reset together with the consumable parts of the production line.

Staggered fastening and mechanical alignment:

smoothly move the parts into the corresponding base of the reaction chamber, use a torque wrench conforming to the industry standard, and gradually apply the torque to the specified value in three times according to the diagonal principle, so as to avoid metal deformation or ceramic brittle fracture caused by excessive force on one side.

Assessment of system-wide evacuation and temperature rise:

lock the cavity after assembly, and start the evacuation procedure to the process standard pressure. Then turn on the heating module, slowly raise the temperature to the rated temperature at a speed of 5 degrees Celsius per minute and keep it for 4 hours, and observe the fluctuation of vacuum degree to confirm zero outgassing under the temperature rise state.

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