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Used AMAT Endura 5500 is the first choice for economical PVD process with high efficiency for 200mm wafers, which can significantly reduce the cost of expansion while ensuring film uniformity. As the source manufacturing factory of semiconductor precision components, Chinsor Tech provides machine renovation and key component optimization with deep independent technology accumulation, eliminating trade links and providing you with highly competitive ex-factory prices.
Used AMAT Endura 5500 is mainly used in integrated circuit metallization, diffusion barrier layer deposition, physical vapor deposition research and development, and 8-inch power device manufacturing.
Compared with the purchase of new PVD equipment, Used AMAT Endura 5500 can save about 50% in capital expenditure, helping small and medium-sized fabs to quickly establish a mature 8-inch production line within a limited budget.
the system supports a variety of metal target sputtering, through accurate DC power control and gas flow management, to ensure that the film formation uniformity is always controlled within 3%, to meet the needs of precision semiconductor process.
equipped with a calibrated manipulator transmission system, the repeated positioning accuracy reaches 0.1mm, which effectively reduces the common risk of chip transfer and plate fragmentation of second-hand equipment and improves the overall production yield.
supports the configuration of TiN, aluminum, titanium or pre-cleaning chambers according to specific process requirements. Its modular design allows users to quickly adjust the machine function according to product iteration requirements in the later stage.
Standardized performance recovery of all cryopumps and molecular pumps, and the vacuum extraction speed reaches more than 95% of the original factory index to ensure long-term stable operation of the machine in a low-pressure environment.
provide detailed equipment operation log records and parts replacement list, so that on-site engineers can quickly take over the machine, shorten the commissioning cycle from installation to formal production.
During the renovation process of the machine, the Used AMAT Endura 5500 provided by Chinsor Tech has upgraded the materials of the original wearing parts, especially the vacuum seal position and heater components. Its durability is better than that of similar unoptimized machines in the market. In addition, Chinsor Tech, relying on the advantages of the source factory, can provide precision machining spare parts that are highly matched with the original parts for second-hand equipment to ensure the continuity of long-term operation of the machine.
in view of the shutdown of key components of old machines, Chinsor Tech uses its own factory research and development capacity to produce replacement-grade high-precision parts, thus solving the pain point that buyers are worried about no replacement parts for subsequent maintenance.
In view of the difficulty of interconnection between different brand machines, we provide a proven communication protocol interface optimization scheme to solve the difficulties faced by purchasing managers in the collaborative operation of old and new equipment.
Through our self-developed high vacuum cleaning technology, we have solved the problem of wafer contamination that may be caused by metal sputtering residues in the second-hand chamber and extended the maintenance cycle.
Responsible for balancing equipment budgets and capacity requirements, seeking highly reliable and affordable 8-inch PVD solutions for rapid production returns.
need to complete the capacity expansion in a short period of time, take a fancy to the advantages of short delivery cycle of second-hand equipment, while requiring the performance of the machine to meet the production standards of mature processes.
To carry out research on new semiconductor materials, a PVD platform with complete functions and flexible architecture is required for experimental verification, and the equipment has high cost performance requirements.
responsible for providing turnkey projects to end customers, requiring stable supply channels for used equipment and supporting spare parts factory support to reduce project execution risks.
verify the power load, cooling water pressure and process gas purity of the clean room according to the manual to ensure that the installation environment meets the basic operation requirements of Used AMAT Endura 5500.
perform a static boost test before starting the process to observe whether the leakage rate of each process chamber meets the standard to ensure that the sputtering process is not interfered by atmospheric impurities.
use the teaching device to zero the coordinates of the robot and pass the chip test, to ensure that the wafer between the Loadlock and the process chamber of the transfer path without friction and accurate positioning.
pre-sputtering operation is carried out with reference to the random parameter records, the film thickness and resistivity of the first wafer are measured, and the DC power value is fine-tuned according to the measured results.
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Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
200mm
Wafer size
4 to 6
Chamber configuration
5e-9 Torr
Ultimate pressure
Wuxi Zhanshuo