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Chinsor Tech focuses on providing the country’s leading eight-inch film deposition equipment and core spare parts to fully assist large semiconductor fab production line upgrades. We are the source manufacturer with more than 50 patents. Excluding middlemen, we deliver goods directly from Wuxi and Taizhou factories to ensure highly competitive ex-factory prices and faster delivery speed.
The equipment and related parts are mainly used in thin film deposition process, physical vapor deposition heating, plasma etching and high-end vacuum chamber system transformation.
independent research and development of physical vapor deposition wafer heating base technology, to achieve efficient heat conduction and extreme temperature uniformity, effectively solve the problem of uneven wafer heating, the overall film film film consistency significantly improved.
the main eight-inch integrated circuit film deposition equipment, after large-scale fab mass production verification, equipment operation is extremely stable and high process repeatability, perfect fit chip manufacturing enterprises large-scale mass production needs.
professional transformation and lower cavity replacement services are provided for old equipment, covering accurate replacement of etch chamber components, effectively prolonging the life cycle of existing equipment and significantly reducing procurement costs.
the core spare parts adopt self-produced precision metal processing parts and high-purity ceramic brittle materials, which have excellent corrosion resistance and can greatly reduce the loss rate of parts in harsh working environments such as plasma etching.
as a senior semiconductor equipment in the industry, parts manufacturer the whole process to control the research and development and production quality. with more than 50 patent technology deposits, the technical indexes of core links all reach the domestic leading level.
providing seamless alternative customized PVD chamber parts solutions, successfully completing equipment renovation and magnet transformation for China Resources Shanghua and other large enterprises, easy installation and plug-and-play, to ensure uninterrupted operation of the production line.
Compared with traditional spare parts suppliers, Chinsor Tech relies on the dual production capacity of Wuxi headquarters and Taizhou production base to achieve complete independent mass production of high-end metal and ceramic spare parts. We not only provide standardized parts, but also have independent research and development capabilities for the core technology of eight-inch semiconductor equipment. We have deep technical accumulation in the underlying logic of semiconductor equipment, and Chinsor Tech has more than 50 patented technologies compared to traders who are only agents, which can directly provide source-level technical support and rapid response refurbishment and overhaul services for large fabs.
Chinsor Tech provides precisely matched core spare parts for classic old platforms, solving the problem of not being able to find original highly matched parts when upgrading production lines.
We have the ability to independently produce high-difficulty ceramic brittle materials, solving the problem that the cavity is extremely susceptible to corrosion and the replacement cost of spare parts is extremely high in the etching process.
with the absolute advantage of independent source factories, direct intervention in equipment renovation and transformation projects, completely solve the long downtime waiting time faced by large fabs during equipment overhaul.
Responsible for the daily maintenance of eight-inch production equipment and the replacement of bottom components, there is an urgent need for vacuum chambers and heating bases with extremely stable performance and long service life to ensure the all-weather stable operation of semiconductor production lines.
Leading tens of millions of major equipment procurement or production line renovation and upgrading projects, tend to look for a sound quality certification and tax excellent qualifications of the source of large factories to cooperate to ensure the absolute security of funds and long-term supply chain stability.
Specializing in the overhaul and renovation of mainstream wafer manufacturing equipment platforms, it is urgent to find source suppliers who understand the underlying deposition process and can stably provide high-quality customized metal and ceramic processing parts.
Engaged in cutting-edge chip manufacturing pilot technology and optoelectronic research and development projects, the quality of the thin film deposition process is extremely high, the source manufacturers need to closely cooperate with the special process environment of parts customization and in-depth technical research.
carefully confirm that the surface of the cavity parts is free of any scratches and particle pollution, strictly check the specifications and models, and ensure that the high vacuum sealing ring and the connection flange interfaces are intact.
the installation operation must be carried out in a clean room with 100 or higher grade, and the flange bolts must be evenly tightened with professional torque tools to ensure the extreme air tightness of the vacuum chamber.
after the equipment is completely assembled, start the vacuum pump group, carry out strict helium mass spectrometry leak detection test, and confirm that the internal vacuum degree completely meets the process standard before setting the initial heating parameters.
regularly check the wear of ceramic components under plasma etching environment, record the film deposition data in detail, and clean up or contact the original factory for replacement in case of abnormal parameters.
certificate
Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
eight inches
Wafer size
Thin Film Deposition
Process Type
precision temperature control
Heating technology
Wuxi Zhanshuo