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Provide nano-scale precision inspection station components and customized transformation, significantly improve wafer defect recognition rate and production line yield. Chinsor Tech is a physical factory integrating R & D and precision manufacturing. It refuses OEM and provides you with factory price and fast delivery cycle.
The equipment components are mainly used in defect review equipment, optical profile scanning station, film thickness measurement module and electron beam wafer inspection link.
Using closed-loop servo feedback system to control the mechanical base, the repeat positioning accuracy is controlled within three microns, the edge alignment error of wafer scanning is reduced by 80%, and the scanning detection efficiency and accuracy are greatly improved.
The components are made of alumina ceramics with a purity of up to 99.99%, which completely avoids the precipitation of metal ions, reduces the secondary particle contamination rate in the detection process to close to zero, and protects the cleanliness of the wafer.
The sealing structure is optimized for the vacuum chamber of the detection equipment, the leakage rate is less than ten to the negative tenth power, the time required from pumping to ultra-high vacuum state is shortened by 30 minutes, and the continuous operation cycle of the equipment without failure is effectively prolonged.
Equipped with high-voltage electrostatic field distribution optimization technology, it provides stable and uniform adsorption force to ensure that the sheet will not undergo small deformation or sliding out of focus during high-speed rotation detection, thus stabilizing the yield of production line end products.
The core metal surface is treated with special anodic oxidation and chemical coating, which can work stably in high temperature of 300 degrees Celsius and fluorine-containing gas environment for a long time, and the service life is twice as long as that of traditional untreated aluminum parts.
As a professional semiconductor equipment parts manufacturer, all the dimensions of the inspection parts we provide strictly comply with the original tolerance standards, realizing plug and play without cumbersome modification of the underlying system parameters.
The inspection parts produced by Chinsor Tech are finished with high-purity ceramics and special alloys. Compared with ordinary machined parts on the market, not only the surface roughness is reduced by 5 times, but also the inspection parts have excellent corrosion resistance and high temperature resistance. As a senior component source factory, Chinsor Tech has mastered the core coating technology and high-precision tolerance control. All replacement parts have undergone strict three-dimensional testing. The operation stability and service life of the equipment far exceed the industry average standard of more than two years.
Optimize the polishing process of the contact surface between the suction cup and the thimble, and solve the problem that the traditional rough material is easy to cause small scratches and metal contamination on the back of the wafer during high-speed transmission and detection clamping.
The rigid and damping structure of the base is improved to overcome the phenomenon of focus misalignment and false defect alarm caused by slight mechanical resonance during high magnification scanning of optical detection equipment.
Provide domestic precision parts solutions that are fully compatible with mainstream platforms, break overseas monopolies, and solve the long-term downtime and waiting for materials caused by large fabs waiting for imported replacement parts.
Technical experts responsible for maintaining high productivity of front-end manufacturing and back-end test equipment are in urgent need of high-stability, long-life test platform replacement parts to reduce downtime maintenance frequency and expensive spare parts procurement costs.
Enterprise project managers who specialize in the refurbishment and reorganization of second-hand equipment need to find source suppliers who can provide a complete set of high-quality processed parts to ensure that the refurbished inspection machine can successfully pass the strict acceptance of the fab.
Researchers who focus on yield improvement and micro-defect analysis have extremely high requirements for wafer loading, heating and positioning accuracy of inspection equipment to ensure absolute accuracy and high repeatability of inspection data.
Managers responsible for cutting-edge chip process development and small batch trial production need highly customized precision machining parts to build or transform experimental testing platforms to meet the stringent testing standards of special new materials.
Please be sure to disassemble the multi-layer vacuum packaging in the 100-level clean room environment, wear anti-static gloves and masks throughout the operation, to avoid human dander or dust pollution of high cleanliness parts surface.
Use a high-precision torque wrench to tighten the fixing bolts in cross order to ensure uniform force on the flange surface. When installing the ceramic thimble, handle it gently to prevent the brittle material from breaking.
After installation, start the dry pump and molecular pump for vacuum pumping operation, and use helium leak detector to carry out detailed helium spray test on all sealing ring interfaces to confirm that the ultra-high vacuum standard is reached.
Open the servo control software of the system, perform zero reset and limit stroke learning, test the positioning accuracy for 10 cycles of no-load operation, and put into actual wafer testing after confirming that there is no abnormal noise.
certificate
Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
0.02
roughness
within three microns
Flatness
eight inch wafer
Applicable
Wuxi Zhanshuo