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With a high proportion of core invention patents and ISO 9001 quality inspection system, Chinsor Tech focuses on providing high-precision metal, brittle ceramics and other cavity core custom parts for mainstream vapor deposition and etching equipment renovation. As a semiconductor source factory with a physical manufacturing base and a multi-axis CNC machining center, Chinsor Tech refuses middlemen to earn the difference, and can directly provide global maintenance upgrade service providers with highly competitive ex-factory prices and agile supply chain delivery.
The precision components provided by semiconductor component suppliers are mainly used in the daily maintenance of mature process platform remanufacturing, film deposition chamber upgrading, process modification and high vacuum interlock transmission.
As a professional semiconductor component supplier, we adopt a multi-axis precision machining center to stabilize the geometric tolerance of the parts within ± 0.001mm, with high installed fit and perfect compatibility with mainstream renovation platforms.
select purity up to 99.7 percent of alumina ceramics and modified aluminum alloy, in the strong plasma bombardment environment to reduce the wear rate of 45%, greatly extend the operating life of the modified equipment internal parts.
the leakage rate of all vacuum chambers and transmission parts is strictly controlled below 10 minus 9 millibar liters per second to ensure the ultimate pressure performance of refurbished equipment under ultra-high vacuum process.
with independent wafer heating technology and software and hardware copyright, so that the temperature difference on the wafer heating surface is less than 0.5 percent, helping refurbished equipment to achieve the original film uniformity in film deposition.
for the old spare parts that have been discontinued by the original factory, we can carry out agile reverse engineering and modification manufacturing according to the drawings or objects provided by the renovation service provider, so as to realize the efficient replacement of the lower cavity and other components.
all delivered parts are ultrasonically cleaned by multiple channels of deionized water before leaving the factory, and vacuum double-layer anti-static packaging is completed in a 10-level ultra-clean room to ensure that there is no secondary pollution during the installation process.
In the equipment remanufacturing and maintenance market, it is very important to find qualified semiconductor component suppliers. Traditional overseas trade-oriented suppliers often lack physical manufacturing and processing capacity, in the face of non-standard customization and original production of spare parts, can not provide accurate technical re-engraving, and due to the layer of change of hands resulting in procurement cycle is usually as long as several months. Chinsor Tech has its own patented R & D team and manufacturing plant. All spare parts are processed with full-process precision and surface treatment in the physical workshop, which can not only shorten the delivery cycle of non-standard customization by more than 25%, but also endow components with better plasma etching resistance and avoid frequent downtime through the independently developed surface modification process.
Chinsor Tech customized parts supply: in view of the problem that the original factory stopped technical support for the early model platforms, which led to the supply of spare parts, we solved the industry pain point that there was no place to purchase non-standard spare parts and the lack of drawings in the renovation of old equipment.
Chinsor Tech high-precision assembly components: In view of the risks of mismatching of form and position tolerances and slight leakage of cavity caused by maintenance engineers using common foundry parts, we have solved the adaptation problem of sealing failure of non-standard modified parts installation.
Chinsor Tech source factory direct supply: in view of the refurbishment service providers from multi-level international traders to take goods led to serious compression of profit margins, we have solved the problem of high procurement costs of semiconductor core spare parts.
It is suitable for technical leaders who specialize in refurbishing old equipment, functional modification and cavity upgrade of fab, and need to find long-term semiconductor component suppliers with reverse engineering and customized processing capabilities.
suitable for on-site engineers who are responsible for the daily maintenance of diffusion, etching and thin-film process lines in wafer manufacturing plants and are in urgent need of cost-effective and stable quality alternative second supply spare parts to ensure equipment utilization rate.
suitable for upgrading 6-inch to 8-inch wafer expansion and transformation projects, the cavity structure, heating plate power control and hardware and software collaboration has a very high demand for non-standard customization of professional and technical teams.
suitable for professional supply chain service providers who have a complete maintenance network in international markets such as Europe, America or Southeast Asia, and need to connect with high-quality source physical factories in China to enrich their high-quality spare parts inventory.
The product must be moved to an ultra-clean workbench of not less than level 100 to open the vacuum double-layer packaging, and a high-purity nitrogen gun must be used to perform dust-free purging on the surface of the parts, and direct skin contact with the surface is strictly prohibited.
Calibrate the positional alignment with the shape tolerance according to the technical specifications of the original equipment, and use tools with preset standard torque for symmetrical locking to prevent metal or ceramic parts from deforming due to uneven force.
After complete assembly, close the cavity and turn on the vacuum pump to pump to the ultimate negative pressure. Use the helium mass spectrometer leak detector to conduct overall detection of the gas circuit joint and cavity seal to ensure that the leak rate meets the process standard.
Before the process gas is officially introduced, the control equipment gradually heats up and bakes the newly installed parts to remove trace volatiles, and introduces inert gas for plasma cleaning.
certificate
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99.70%
Material purity
± 0.001mm
Machining accuracy
200mm
Applicable process
Wuxi Zhanshuo