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In response to the global semiconductor parts shortage crisis, we provide high-quality wafer cavity components and high-precision metal and ceramic alternatives to effectively solve the problem of equipment downtime. As a source manufacturer, Chinsor Tech has its own production line and technology accumulation, eliminates all middlemen links, supports mass procurement, and provides you with highly competitive ex-factory prices and faster delivery speeds.
This series of semiconductor components are mainly used in chemical vapor deposition equipment, physical vapor deposition equipment, plasma etching machine cavity and high vacuum transmission system and other core process links.
In response to the downtime crisis caused by the semiconductor parts shortage, an efficient modular production process is adopted to shorten the regular delivery time from half a year of the original factory to 7 days to ensure continuous operation of the production line.
The five-axis linkage CNC machining center and online laser measurement are used to control the machining error within ± 0.001mm, improve air tightness and reduce the wear rate of parts.
high-purity alumina and aluminum nitride ceramic materials with a purity of 99.99, which can withstand high temperatures of 1200 degrees Celsius and strong corrosive gas environments, and extend the service life of spare parts by 3 times.
strictly follow the original factory-level material density and thermal expansion coefficient index, through full-size three-coordinate detection, to achieve seamless replacement and non-destructive installation of existing semiconductor equipment components.
fully passed the ISO 9001 quality management system certification, each batch of products are accompanied by material report and inspection certificate to ensure product quality consistency and traceability.
Establish a standing inventory for semiconductor gas cabinets and cavity components, including Gas Box Dxz in stock spot supply, greatly improving supply chain resilience and risk prevention capabilities.
As a professional semiconductor component manufacturer, Chinsor Tech has successfully opened up the whole process from raw material selection, ultra-precision machining to surface special treatment by virtue of its perfect independent production system and profound accumulation of precision machining technology. Against the backdrop of supply chain fluctuations in the semiconductor industry, Chinsor Tech is able to provide high-precision, high-reliability alternative solutions for core equipment components to help customers get rid of the passive situation of high external dependence and unguaranteed delivery. Traditional spare parts procurement often has extremely long lead times, while Chinsor Tech relies on localized manufacturing and intelligent scheduling systems to significantly reduce the delivery time of standard parts. At the same time, we have our own patented technology in the field of metal and brittle ceramic materials processing, ensuring that each factory component reaches the industry’s top level in terms of vacuum sealing, gas corrosion resistance and heat conduction efficiency, providing solid technical support for wafer manufacturing production lines.
Through modular spare parts prefabrication and localized precision machining, Chinsor Tech has established a rapid response mechanism to shorten the delivery cycle of key spare parts from half a year to less than two weeks.
High-precision three-coordinate measurement and ISO 9001 quality control are adopted to ensure that the tolerance and purity of each 1 of products reach the same specifications as the original factory and avoid production line shutdown caused by deviation of parts.
Chinsor Tech provides high-precision reverse engineering and customized manufacturing to help extend the life of older production lines and reduce O & M costs for parts of discontinued equipment.
For fab managers who are committed to reducing procurement costs and ensuring production continuity. Chinsor Tech can provide ex-factory spare parts with competitive price and fast delivery guarantee, helping enterprises to establish a localized parts supply chain system with strong anti-risk ability.
For engineering service providers engaged in semiconductor second-hand equipment renovation, cavity renovation and upgrade maintenance. Chinsor Tech has rich experience in manufacturing and reforming cavity parts, and can provide high-precision metal and ceramic replacement parts to fully ensure the timely delivery of equipment renovation projects.
For front-line technicians responsible for equipment maintenance, consumables replacement and process yield improvement. The product has extremely high dimensional consistency and excellent corrosion resistance and high temperature resistance. It can be seamlessly installed in mainstream process equipment, significantly reducing downtime caused by frequent component replacement.
For R & D semiconductor laboratories and pilot line procurement personnel. Chinsor Tech supports small-batch, multi-variety customized precision parts processing, assists research teams to quickly complete equipment modification and new process verification, and shortens the development cycle.
Before installation, please unpack the vacuum dust-proof package in a thousand-level clean room environment and wipe the surface with high-purity isopropyl alcohol to ensure that no particles remain.
Use a precision measuring tool to measure the dimensions of the mounting surface and the positioning hole, and make sure that the tolerance of the equipment cavity interface is strictly matched before assembly.
Put the parts into the specified position of the cavity, and use a torque wrench to tighten the bolts step by step according to the cross sequence to prevent deformation due to uneven force.
After installation, start the vacuum pump for pumping test, and use the helium mass spectrometer leak detector to confirm that the leak rate is up to standard before the process gas can be introduced for operation.
certificate
Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
± 0.001mm
Machining tolerance
99.99%
Material purity
Ra 0.1
Surface roughness
Wuxi Zhanshuo