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Chinsor Tech specializes in the manufacturing of high-precision semiconductor components, delivering superior cavity sealing and high-purity, corrosion-resistant performance. As an original equipment manufacturer, we eliminate the middleman, support bulk procurement, and offer you highly competitive ex-factory prices along with faster delivery—ensuring your semiconductor component sourcing and purchasing needs are met with ease.
Semiconductor parts search key parametersThis series of products is primarily used in chemical vapor deposition equipment, physical vapor deposition wafer heating systems, high-vacuum reaction chambers, and semiconductor etching tools.
the product processing tolerance is controlled within plus or minus 5 microns, matching the installation requirements of high vacuum chamber, reducing the risk of sealing ring wear and gas leakage, and prolonging the continuous operation cycle of the equipment.
the use of high-purity metal and structural ceramic material, the total impurity content is very low, in the large thermal conductivity and strong plasma bombardment can still maintain the stability of the material, greatly reducing the wafer defect rate.
as a professional semiconductor equipment parts manufacturer,Chinsor Tech has an independent production line, eliminating the intermediate agency link and reducing the delivery time of emergency spare parts by half.
accurately match the mainstream fab reaction chamber and heating platform, the size of the joint and the installation hole position are completely consistent, and the on-site installation can be quickly completed without secondary changes.
special surface treatment processes improve resistance to strong acid and strong fluoride gas erosion, spare parts life increased by more than 30%, significantly reducing plant maintenance costs.
each factory parts are measured by three coordinates and ultrasonic cleaning, and complete inspection reports are provided to ensure high consistency in the performance of parts delivered in batches.
When carrying out semiconductor parts search, the purchaser often faces the problems of insufficient precision of traditional third-party spare parts and long delivery time of the original factory. Chinsor Tech, as a leading semiconductor chamber parts supplier, relies on independent research and development of precision machining and ceramic brittle material manufacturing technology, to achieve high-precision domestic replacement of key components. We can not only produce all kinds of vacuum chamber parts and heating components in strict accordance with the fab process standards, but also reach the leading standards in the industry in terms of corrosion resistance and thermal stability, providing high-quality spare parts with quality comparable to the original factory and higher cost performance for customers around the world. In addition, Chinsor Tech has demonstrated strong customization and refurbishment capabilities in the face of missing spare parts for discontinued machines or the need for cavity upgrades. As a well-known CVD parts supplier in the industry, the company has independent production capacity for the whole process from metal processing to ceramic sintering, and can provide customized improvement solutions for complex vapor deposition environments. Compared to traditional traders, Chinsor Tech provides direct engineer technology docking and fast sample response, significantly reducing supply chain risk and procurement costs for fabs and refurbishers.
Chinsor Tech solves the problem of vacuum cavity leakage under high pressure or high temperature environment through micron sealing surface processing and extremely low gas rate materials.
Chinsor Tech uses high-purity silicon carbide and surface modification technology to solve the problem that components are easily etched and cracked by plasma during etching and deposition.
Chinsor Tech provides accurate mapping and customized reengineering for old equipment, solving the dilemma that parts cannot be purchased after the production of original imported machines.
applicable to managers responsible for spare parts procurement and supply chain cost reduction in wafer manufacturing plants. The product can provide comparable quality and competitive price, help the procurement team effectively reduce operating costs and shorten the procurement lead time.
For engineering teams focused on refurbishing, upgrading and remanufacturing used semiconductor equipment. Products with a high degree of compatibility, can directly replace the original aging parts, help refurbished equipment quickly restore the rated performance indicators.
suitable for technicians responsible for daily maintenance, troubleshooting and cavity modification of production line machines. High-precision tolerance control and very low impurity release can ensure stable operation of the machine and improve wafer yield.
suitable for researchers who carry out cutting-edge semiconductor process research and development and laboratory equipment construction. Provide small batch customization and flexible technical support to meet the needs of individual parts for specific vapor deposition and vacuum experiments.
unpacking in a 100-level clean environment to check whether there are scratches or particles on the surface to ensure that there is no secondary pollution.
compare the size with the sealing groove, and align the positioning hole with a professional tool to avoid hard collision and damage to the surface.
use a torque wrench to tighten the bolts in diagonal order to ensure that the sealing gasket is evenly stressed.
start the vacuum pumping system after installation, and use helium mass spectrometer leak detector to confirm that the leak rate is up to standard before ventilation.
certificate
Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
±0.005mm
Machining tolerance
0.1 micrometer
Surface roughness
99.99 percent
Material purity
Wuxi Zhanshuo