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The high-end semiconductor exhaust treatment spare parts provided by Chinsor Tech are precision machined from corrosion-resistant special ceramics and high-purity metals, significantly extending the operating life of the emission reduction system in the harsh wafer manufacturing environment. Chinsor Tech is a source manufacturer with independent technology accumulation, rejecting middlemen’s price increases, offering mass customization and direct ex-factory prices to ensure faster global delivery.
Semiconductor abatement spare parts is mainly used in chemical vapor deposition exhaust gas treatment, physical vapor deposition vacuum exhaust system, etching process toxic gas degradation and diffusion furnace exhaust gas combustion treatment device.
the use of high-purity alumina and silicon carbide materials, through precision grinding control axial tolerance, to solve the problem of thermal stress cracking in the high temperature combustion chamber, so that the overall mechanical strength of spare parts increased by 40%.
the metal sealing surface is ultra-fine ground to ensure that the matching gap reaches sub-micron level, effectively prevent the leakage of fluorine-based toxic gas, and reduce the unplanned downtime of the emission reduction system by 65%.
surface application of special anti-corrosion vapor deposition coating, resist strong acid by-products on the substrate erosion, in the continuous etching tail gas treatment to extend the parts replacement cycle more than 1 times.
precision manufacturing process based on independent intellectual property rights ensures that the physical characteristics of each cavity connector and heating element are highly consistent, perfectly matching the mainstream 8-inch wafer manufacturing line.
The core overcurrent components can operate stably for a long time in an ultra-high temperature combustion degradation environment, eliminating flow channel blockage caused by material softening or deformation, and maintaining the safety of the fab power workshop.
Each batch is rigidly tested by a three-coordinate measuring instrument and a helium mass spectrometer to ensure full compliance with the high dust-free and vacuum standards of the international semiconductor supply chain.
Relying on years of independent research and development experience in the field of semiconductor core components, Chinsor Tech has obsolete the processing problems of metal and non-metal composite structures. The semiconductor abatement spare parts we produce has extremely high thermal shock stability and wear resistance. It can still maintain structural integrity under the working environment of long-term alternating thermal stress, and its service life is significantly better than that of the lack of technology accumulation in the market. In addition, because Chinsor Tech has a complete ceramic brittle material processing line and precision metal CNC lathe, we can quickly restructure according to the special structure of different fab exhaust pipes. Not only does the product size completely meet the elevation standard, but also by optimizing the internal flow channel design, the exhaust gas degradation efficiency and air flow through the smooth degree have been significantly improved, helping customers reduce the overall operation and maintenance costs.
Chinsor Tech’s high-temperature exhaust spare parts solve the problem of brittle fracture and fragmentation caused by mismatch of thermal expansion coefficient during frequent temperature rise and fall of traditional spare parts by optimizing the material ratio and sintering process.
Chinsor Tech precision cavity spare parts adopt ultra-high mirror polishing surface treatment, which solves the problem that rough inner walls are easy to adhere to reaction by-products and crystallizes, and greatly prolongs the dredging maintenance period.
Chinsor Tech high-purity ceramic bushings to strictly control the impurity content, solving the problem of common parts releasing harmful particles under strong plasma bombardment, thus affecting the yield of the front-end process.
Suitable for engineers responsible for power auxiliary systems in large factory film deposition and etching workshops. The product can directly replace the original high-loss waste gas treatment parts, to meet the factory’s high supply chain security and cost-effective components procurement needs.
suitable for professional institutions focusing on the transformation and renovation of second-hand equipment. Chinsor Tech provides high-precision structural adapters and lower chamber replacements to help refurbishers quickly restore the exhaust treatment efficiency of old platforms.
suitable for complete equipment manufacturers who design exhaust purification projects specifically for the pan-semiconductor industry. High-performance spare parts supply can improve the durability of its overall purification system and help it establish quality advantages in bidding projects.
suitable for major microelectronics pilot technology research institutes and university test lines. To meet its special process development process, for customized, high-specification corrosion-resistant vacuum exhaust parts of scientific research and trial production needs.
The sealed package must be opened in a cleanliness environment of ten thousand or higher before use. Carefully check the surface of the spare parts for transport micro-cracks and wipe the surface with high purity isopropyl alcohol to ensure that no particles remain.
Put the spare parts into the predetermined slot of the tail gas treatment chamber. The use of special tooling to ensure that the axial and radial direction are completely centered, to avoid uneven stress caused by special ceramic or quartz parts in the subsequent fastening process of local concentration of stress.
Flange connection bolts must be tightened repeatedly and symmetrically with a torque wrench, and must not be locked once on one side. Strictly follow the industry-recommended torque parameters to prevent excessive extrusion from causing the internal sealing gasket to deform and fail.
After installation, the valve must be closed and the overall abatement pipeline must be tested for tightness using a helium mass leak detector. After confirming that the air leakage rate meets the standard, inert gas can be introduced for temperature rise test, and finally put into conventional waste gas treatment.
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99.90%
Material purity:
0.2 microns
Surface roughness:
DN50
Applicable pipe diameter:
Wuxi Zhanshuo