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Zhanshuo Technology provides core component manufacturing and complete system renovation of physical vapor deposition equipment for Endura 5500 platform to ensure that the vacuum environment and film deposition uniformity reach the industry-leading level. As the source manufacturing factory of semiconductor high-end equipment components, Wuxi Zhanshuo has independent research and development patents and production bases, eliminating middlemen’s price increase, and providing you with more competitive ex-factory prices, faster customized delivery and full technical support.
Endura 5500 is mainly used in metal interconnect deposition, diffusion barrier layer preparation, advanced package bump process and through silicon via metallization process in integrated circuit manufacturing.
Through the use of high-precision vacuum sealing components developed by Zhanshuo Technology, the air release rate is reduced by 40%, ensuring that extremely high vacuum stability is maintained in continuous operation and effectively improving the purity of film formation.
The temperature control accuracy reaches plus or minus 1 degree Celsius. By optimizing the internal hot runner design of the heating ceramic plate, hot spots on the wafer surface are eliminated, and the thickness consistency of thin film deposition is improved by 15%.
all metal and non-metal components are re-engraved 1 to 1 with high precision according to the original factory specifications, and the tolerance is controlled within 0.01mm to ensure seamless physical compatibility with the existing Endura system.
for etching and vapor deposition environment, the surface of the parts after a special ceramic coating treatment, plasma erosion resistance increased by 1 times, the replacement cycle of key consumables extended by more than 3 months.
The loading cavity upgrade scheme for the old system improves the wafer transfer efficiency by 20%, and significantly reduces the risk of particle contamination during handling by reducing mechanical vibration.
combined with software copyright technology of zhanshuo technology, it provides controller upgrade for 5200 and 5500 platform, solves the maintenance problem caused by the shutdown of old computer hardware, and ensures the continuous operation of the production line.
The Endura 5500 adapter component produced by Zhanshuo Technology strictly matches the international first-line standard in material purity. Its core metal parts are made of high-purity aluminum and stainless steel. After special electrolytic polishing process, the surface roughness is reduced to below 0.2 microns. Compared with similar refurbished parts in the market, Zhanshuo Technology’s products have undergone three-coordinate precision detection and helium mass spectrometry leak detection before leaving the factory, ensuring that every 1 product can show excellent zero leakage stability in extremely high vacuum environment.
In view of the high price of original spare parts and the pain point of procurement cycle for several months, Zhanshuo Technology takes advantage of the source factory to shorten the delivery time of standard spare parts to two weeks, greatly reducing the pressure of fab storage.
in the face of the old model spare parts stop support problem, zhanshuo technology through reverse engineering and independent research and development, to achieve the continuous supply of key controlled parts, so that the customer’s 8-inch line equipment life extended by more than 5 years.
In view of the common problems of uneven film formation and peeling in the process, Zhanshuo Technology significantly reduced the process defect rate and improved the yield of the product by improving the material distribution of the heating plate and the treatment process of the inner wall of the vacuum chamber.
suitable for mature process foundries seeking stable capacity output, helping them to achieve efficient operation of production lines through component upgrades and system refurbishment within a limited budget.
provide professional refurbished technical support and high-quality spare parts for merchants engaged in global equipment circulation, and enhance the market resale value and technical credibility of their used equipment.
provide customized PVD experimental platform for universities and research institutions to meet their special requirements for vacuum environment and thermal field distribution in the development of new thin film materials.
suitable for non-semiconductor enterprises that need high-purity metal coating process, using mature semiconductor-grade equipment to achieve high-quality cross-industry processing and production.
ensure that all installed components have passed the clean room packaging inspection, and the surface should be clean before being installed in the cavity to avoid any grease or fiber residue on the vacuum contact surface.
After installation, a gradient temperature rise test is required through the control system to observe whether the feedback data of the thermocouple in the interval of 100 to 500 degrees Celsius meets the process standard.
for the refurbished machine, the coordinate teaching of the robot arm between the LoadLock and each process chamber must be repeated to ensure that there is no offset and wear during the wafer pick-and-place process.
It is recommended to regularly perform an in-chamber cleaning process based on the accumulated deposition thickness to remove accumulated metal deposits and prevent particle flaking from contaminating the wafer surface.
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Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
200mm
Maximum wafer size
less than 1E-8 Torr
Vacuum limit pressure
maximum 550 degrees Celsius
Heating temperature
Wuxi Zhanshuo