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Zhanshuo Technology focuses on the research and development and precision manufacturing of core components of Endura 5500 PVD equipment, providing a complete set of solutions covering cavity modification, heater upgrade and vacuum system optimization. Chinsor Tech is the source manufacturing plant with its own production base, which can bypass the trade link and provide global semiconductor customers with cost-competitive original factory-quality components and shorter delivery cycles.
Endura 5500 PVD is mainly used in metal interconnect deposition, diffusion barrier process, seed layer preparation and silicon through hole metallization of 200mm wafers.
through the use of zhanshuo technology self-developed ceramic heating technology, the uniformity of thermal field distribution has been improved by a 20%. This precise temperature control effectively reduces the film stress cracks caused by the temperature difference, and significantly improves the yield of the product.
Our Endura 5500 PVD adapter chamber has been specially electropolished to achieve a surface roughness of less than 0.2 microns. With high-quality seals, the air release rate is reduced by 30% and the maintenance cycle of the pump unit is extended.
high-performance ceramic materials are used in key insulation and support parts, and the plasma erosion resistance is 2 times higher than that of ordinary materials. This means less frequent component replacement and an increase of 15 days per year in the effective boot time of the device.
All Endura 5500 PVD parts are produced based on high-precision three-coordinate measurement data, and the tolerance is strictly controlled within 0.01mm. It ensures perfect compatibility with the original system and avoids mechanical interference during installation.
A modified scheme for the transmission link effectively reduces the vibration frequency during the wafer pick-and-place process. By reducing the metal particles generated by mechanical friction, the risk of particle contamination inside the cavity is 40% reduced.
combined with 11 software copyrights to provide controller compatibility solutions for the old Endura 5500 PVD. The risk of system paralysis caused by the shutdown of the original hardware is solved, and the continuous stability of the mature process production line is guaranteed.
The Endura 5500 PVD core components provided by Chinsor Tech are more targeted in material selection. In view of the long-term operating pressure of the domestic mature process production line, the heat conduction path of the heating plate and the geometry of the shielding cover were optimized twice. Under the premise of ensuring 100% physical compatibility with the original machine, the problem of thermal fatigue deformation of the original parts at extreme high temperatures is solved through independent patented technology, and the comprehensive service life of spare parts is extended by 25% on average.
In view of the current situation that the original factory gradually stopped technical support for the old models, Chinsor Tech provided a full set of domestic alternatives, reducing the purchase cost of spare parts by about 40%.
We solved the problem of insufficient inventory and logistics lag of traditional traders, and used the production scheduling capabilities of the source factory to reduce the response time of critical PVD spare parts from months to weeks.
In response to the problem of cavity-to-cavity differences that process engineers have a headache, we have ensured process matching between multiple Endura 5500 PVD machines through strict tolerance management and material consistency control.
suitable for technical supervisors who are responsible for daily maintenance of production lines and pursue high cost performance and supply stability of spare parts to help them reduce the production cost of each wafer.
For refurbishers who need large quantities of high-quality Endura 5500 PVD accessories to restore the performance of old machines, providing reliable source supply chain security.
For companies that require highly reliable coating processes in the manufacture of power devices or sensors to achieve complex process goals with stable PVD hardware support.
It is suitable for scientific research teams that have customized experimental equipment or need hardware modification, and provides flexible component design solutions to adapt to the development of new materials.
after replacing Endura 5500 PVD parts, it is necessary to start the dry pump and molecular pump unit for pre-pumping for more than 12 hours, and use helium mass spectrometer leak detector to confirm that the leak rate is lower than the standard value.
When the heating plate is first activated, the temperature should be slowly increased at a rate of 5 degrees Celsius per minute to prevent cracks in the ceramic material due to thermal shock, and the feedback curve of the thermocouple should be recorded.
After replacing the LoadLock or cavity assembly, you must enter the service mode to redefine the robot’s pick and place coordinates to ensure that the wafer is in the center position to prevent edge contact contamination.
The Engineer shall monitor the film thickness based on the cumulative number of microns deposited, and periodically clean the excess metal deposited on the shield to prevent stress accumulation causing particles to flake into the process area.
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Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
200mm
Wafer size
1E-9 Torr
Vacuum limit
plus or minus 1 degree
Temperature control accuracy
Wuxi Zhanshuo