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Chinsor Tech provides high-quality Endura 5500 Pvd core process cavity spare parts and complete machine renovation and upgrading services for semiconductor manufacturing, perfectly matching the needs of high vacuum and uniform wafer heating. As a source manufacturing plant with independent intellectual property rights and a number of patents, we eliminate all middlemen and directly provide global fabs with highly competitive ex-factory prices, mass customization services and faster delivery.
Endura 5500 Pvd is mainly used in integrated circuit thin film deposition, physical vapor deposition wafer heating, high vacuum chamber sealing, and metal and ceramic brittle material processing in high vacuum environment.
The spare parts are completely designed based on the physical characteristics of the original factory machinery, and the geometric tolerance is controlled within 0.02mm to ensure seamless matching with the existing equipment cavity and avoid wafer scratches or vacuum leakage caused by dimensional deviations.
The advanced wafer heater structure design is adopted to control the surface temperature difference of the whole wafer within plus or minus 1.5 at an operating temperature of 450 degrees Celsius, which significantly improves the thickness uniformity and repeatability of thin film deposition.
high-purity special ceramics and densified metal materials are selected to significantly reduce the physical bombardment wear in a strong plasma environment, and extend the replacement cycle of core wearing parts by more than 35%.
vacuum chamber spare parts undergo strict surface treatment and degassing process, and the ultimate vacuum degree can reach 10 negative 8 torr, effectively reducing impurity defects in the process and improving chip yield.
not only provide parts, but also have the overall upgrade and transformation capability for key parts such as load lock and lower cavity, so as to restore and improve the system stability of the old platform.
The entire manufacturing process strictly implements international quality management system standards, and each product passes high vacuum and pressure resistance tests before leaving the factory to ensure high reliability on the mass production line.
The Endura 5500 Pvd spare parts and machine modification service provided by Chinsor Tech, relying on mature manufacturing technology and rich project site experience, has achieved mechanical performance comparable to that of the original factory and greatly shortened the procurement cycle. Compared with the traditional expensive original factory support, we can provide flexible customized improvement for the specific production line process needs of customers, and achieve higher cost performance and supply chain autonomy.
Chinsor Tech provides a full set of self-developed process spare parts, which solves the risk of equipment downtime in mature process fabs caused by the shutdown of technical support by the original factory or the shutdown of parts.
Chinsor Tech optimizes the heating wire wiring and material density inside the heater, solving the problem of excessive temperature gradient during heating of common replacement parts, resulting in substandard film deposition uniformity.
Chinsor Tech has a professional engineering team to assist in the modification of the machine, which solves the problem that the fab cannot find a source factory with technical accumulation when carrying out the lower cavity replacement or load lock modification.
suitable for engineers responsible for the maintenance of production line equipment such as analog chips, power devices and micro-electromechanical systems to help them solve the problems of core cavity wear and wafer heater aging.
suitable for independent third-party enterprises specializing in second-hand semiconductor machine refurbishment, machine modification and second-hand trade, to provide stable, high-quality source component supply chain support.
Suitable for procurement decision makers who are facing the pressure of high maintenance costs in the original factory and urgently need to find quality component replacement suppliers with quality system certification and stable delivery capabilities.
suitable for universities and scientific research platform technical teams that run special process development, need to customize the local structure of physical vapor deposition chambers or upgrade the function of the machine.
efore replacing the core spare parts, the sealing surface of the chamber must be thoroughly cleaned to ensure that there are no residual particles, and special tools are used to symmetrically tighten the bolts to ensure high vacuum sealing effect.
After installing the new wafer heater, multi-point temperature gradient test shall be carried out in vacuum state, and the temperature shall be gradually raised to the process temperature to ensure that the temperature uniformity meets the requirements of the production line.
When the spare parts are put into use for the first time, it is recommended that the hardware engineer gradually increase the radio frequency power, observe the reflected power of the cavity and the plasma glow state, and ensure that the electrical connection matches.
According to the cumulative number of wafers processed, the surface particles of the inner wall of the cavity and the ceramic shield are cleaned regularly to avoid the surface contamination of the wafer caused by the peeling of deposits.
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Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
8 inches
Applicable wafer size
physical vapor deposition chamber
Process chamber type
10 to the negative 8 torr
Ultimate vacuum degree
Wuxi Zhanshuo