centura amat

AMAT Centura is a configurable single-wafer, multi-chamber platform family. This page presents one used Centura II DPS 8-inch tool and the identification checks needed before a commercial or technical evaluation.

Match the installed chamber, wafer size, serial number, interfaces, and hardware revision to your requirement before requesting a quote.

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E10-0015_DRP1P3-AMAT_Centura II DPS

What “Centura AMAT” Identifies

“AMAT Centura” identifies an Applied Materials platform family, not one fixed process chamber. Centura systems have been used with etch, CVD, HDP-CVD, epitaxy, and thermal-process configurations. The process capability of a particular tool depends on the installed chambers and supporting hardware.

For parts or equipment sourcing, narrow the description in this order: platform generation, process category, product or chamber family, wafer size, part number and revision, and the installed tool configuration. A Centura II DPS etch tool cannot be evaluated from the word “Centura” alone.

Common Centura Names and What They Indicate

Name in a listing or record	What it narrows down	What still requires confirmation
Centura or Centura 5200	Platform family or mainframe range	Installed process chambers, wafer size, interfaces, and revision
DPS or DPS Plus	Decoupled Plasma Source etch product context	Metal or polysilicon application, chamber version, wafer size, and hardware revision
DXZ	CVD product context	Film application, chamber configuration, wafer size, and process kit
Epi	Epitaxial deposition context	Epi generation, wafer size, chamber count, and installed options
RTP, XE, XEplus, or Radiance	Rapid thermal processing context	Exact product generation, chamber version, wafer size, and controls

Configuration Evidence to Confirm

Start with the tool nameplate and configuration records. Record the mainframe generation, serial number, Tool ID, wafer size, chamber names, and installed auxiliary modules. Photographs of the chamber labels, load locks, robot area, gas panels, electrical cabinets, and utility interfaces help connect the listing to the physical tool.

Then compare the required process and facility conditions with the installed hardware. Confirm chamber type and revision, RF and bias hardware, gas-delivery configuration, vacuum pumps, cooling requirements, electrical service, exhaust, controls, software state, and any previous upgrades. Use the current installed configuration and modification history when they differ from the original model description.

Available Centura Tool

The specified product page identifies one used Centura II DPS 8-inch system. Review the tool identity and stated condition below, then use the detail page for the original listing.

E10-0015_DRP1P3-AMAT_Centura II DPS

Used Applied Materials Centura II DPS 8-inch tool. The product page lists S/N 9532, Tool ID DRP1P3, and the condition Used – As Is / Deinstalled.

PlatformApplied Materials Centura II DPS
Wafer size8-inch
Serial number9532
Tool IDDRP1P3
ConditionUsed – As Is / Deinstalled

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DPS Fit Boundaries

DPS means Decoupled Plasma Source in the Centura etch product context. Public records distinguish silicon etch, metal etch, DPS, and DPS Plus products. These names describe different process or hardware contexts and do not establish direct interchangeability.

For a tool or chamber match, confirm whether the installed configuration is intended for metal or polysilicon etch, the wafer size, chamber generation, source and bias hardware, process kit, interface geometry, and hardware revision. For replacement parts, retain the complete part number and any REV or suffix exactly as marked. A visually similar part should also be checked for material, coating, sealing faces, gas and cooling passages, electrical connections, cleanliness, and process compatibility.

Used Tool Inspection and Release Scope

Define the inspection and release scope in the quotation or purchase documents so each result is tied to the actual tool and agreed acceptance conditions.

Identity and documentation

Match the model, serial number, Tool ID, chamber labels, installed options, and quantity of included modules to the quotation and packing list. Request available deinstallation records, maintenance history, modification records, manuals, software or controller information, and photographs that show the actual tool condition.

Physical and interface inspection

Inspect for impact damage, corrosion, residue, coating damage, missing covers, damaged sealing faces, disconnected utilities, and transport restraints. Check mechanical mounting points, vacuum connections, gas lines, cooling circuits, exhaust, electrical service, network or host interfaces, and facility clearances against the receiving site.

Functional test scope

Define which checks will be completed before shipment or after installation. Depending on the agreed scope, these may include vacuum and leak checks, robot motion and position checks, interlock verification, RF and power-system checks, cooling and gas-panel checks, controller startup, alarms, and chamber-specific testing. Record the test method, acceptance limit, result, and tool state for each agreed item.

Shipment and site readiness

Confirm the included subassemblies, loose parts, pumps, chillers, cabinets, fixtures, manuals, and software media before packing. Agree on preservation, moisture and shock protection, lifting points, transport restraints, crate dimensions, gross weight, unloading method, and receiving-site utilities before dispatch.

Information for a Configuration-Matched Quote

Provide the intended process, wafer size, required chamber configuration, delivery destination, and required date. If the inquiry concerns the listed tool, reference E10-0015_DRP1P3, S/N 9532, and Tool ID DRP1P3.

For a parts or upgrade inquiry, include the complete part number and revision, installed chamber name, old-part photographs, quantity, material or surface requirements, and any drawing or BOM reference available for comparison. State the requested test, documentation, packing, installation, and commissioning scope because these items affect price and lead time.

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Centura AMAT Questions

These answers cover the identification and commercial details most often needed before a Centura tool inquiry.

Is this listing for an 8-inch tool?

Yes. The specified product page identifies this Centura II DPS tool as an 8-inch system. Match that statement to the nameplate, chamber labels, robot and load-lock configuration, and any available configuration records during inspection.

Does “Centura” identify the process chamber?

No. Centura is a platform family used with multiple process products. Confirm the chamber family and process context, such as DPS etch, DXZ CVD, Epi, or RTP, together with the installed hardware.

What does “Used – As Is / Deinstalled” mean for the evaluation?

It describes the listed commercial condition. Define the included equipment, inspection scope, functional test scope, missing items, packing, installation work, and acceptance criteria in the quotation and purchase documents.

What should be sent with a quote request?

Send the required process, wafer size, chamber configuration, destination, timing, and the tool reference. For parts, also send the complete part number and revision, old-part photographs, quantity, and available drawing or BOM references.