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As an original equipment manufacturer with a strong foundation in proprietary technology, Wuxi Chinsor Technology Co., Ltd. specializes in providing high-precision chamber upgrades, wafer‑heating plates (such as the 0020‑23350 RF heater shield), and custom-designed, refurbished precision ceramic and metal spare parts for applied materials semiconductor equipment. By eliminating all intermediary layers, we leverage our full‑scale manufacturing capabilities to offer you highly competitive ex‑factory pricing, faster delivery times, and superior localized technical support.
This series of products and services are widely used in key process environments such as integrated circuits, thin film deposition, physical vapor deposition wafer heating, and plasma etching. As the industry’s leading semiconductor equipment parts manufacturer, we are committed to providing you with high-quality, highly compatible equipment critical spare parts solutions.
we have independent technology accumulation, for applied materials semiconductor equipment to provide high-precision cavity (such as CVD, PVD, vacuum cavity) manufacturing and transformation. Its process indicators are completely standard factory, ensuring excellent process compatibility and stability in high-demand environments such as thin film deposition and vapor deposition, and greatly reducing the offline time of your equipment.
for PVD and CVD wafer heating system to carry out technical research, optimize the internal micro-thermal conduction structure of the heating plate. Under the high vacuum working environment of 350 ° C. to 450 ° C., the wafer surface temperature uniformity is improved to an excellent state, the wafer warpage caused by local thermal stress is effectively avoided, and the uniformity of the film deposition thickness is significantly improved.
the combined process of high-specification semiconductor-grade metal and special ceramic coating is adopted, which is specially designed to provide replacement manufacturing for plasma etching equipment (DPS POLY Lower Chamber). As a trusted supplier of CVD parts supplier and etching components, we provide products with excellent resistance to high-energy ion bombardment, so that the overall service life of the components is 1 times longer than conventional retrofit parts.
Precision mechanism reconstruction and gas path optimization are implemented for the classic Endura platform lock chamber, significantly reducing the generation of particulate matter during high and low pressure switching. Its advanced shaft sealing and lifting mechanism improved design, the vacuum pumping speed and recovery stability are greatly improved, eliminating the hidden danger of process interruption caused by air leakage in the lock chamber.
We have advanced porcelain making and ultra-precision grinding capabilities, customized manufacturing including ceramic shower head (Showerhead), ceramic insulating ring, ceramic electrostatic chuck, etc. While ensuring the micron-level dimensional tolerance, the surface roughness reaches the nanometer level, which eliminate the particulate (Particle) pollution caused by the peeling of the dielectric material from the source.
as a high-tech enterprise with 52 patents (including a high proportion of invention patents) and 11 software copyrights, the company implements ISO 9001 quality certification standards in raw material procurement, precision machining, clean room assembly and ex-factory inspection, providing you with alternative grade parts with stable quality and 100 traceability.
Chinsor Tech’s applied materials semiconductor equipment refurbishment and spare parts replacement program completely solves the passive situation of fabs and equipment refurbishers facing the high cost of original spare parts and the lead time of many months. As a professional semiconductor equipment parts manufacturer, we provide 100 percent precision replacement parts that match the original PN code (such as 0020-23350 RF heater shield). Relying on the deep technical accumulation in the field of precision processing and 8-inch CVD equipment, the cavity replacement parts and wafer heaters we manufacture are not only fully compatible with the original factory in size, but also reach the industry-leading level in many core process performances. In addition, as a source factory, Chinsor Tech has a high-specification manufacturing system integrating R & D, production and testing. We not only provide equivalent replacement of basic components, but also carry out customized structural transformation (Retrofit & Modification) according to the process bottlenecks actually encountered in the customer’s production line. In the process of providing high-quality PVD chamber parts upgrade and manufacturing, we upgrade the traditional fragile metal parts to ceramic brittle materials with better performance, so that the working life of the system in strong corrosion, high-power RF environment has been a qualitative leap.
Chinsor Tech provides cost-effective 1:1 precision spare parts and cavity renovation and replacement services for applied materials semiconductor equipment classic platform, perfectly solves the maintenance problems after production of original equipment (EOL), and saves customers more than 40% of spare parts purchase expenses.
Chinsor Tech, as an experienced CVD parts supplier, optimizes the developed wafer heater (Wafer Heater) and adopts advanced three-dimensional heat conduction structure and precision resistor arrangement to solve the problem of poor CVD film thickness and in-chip uniformity caused by large temperature difference on the surface of the heating plate, thus significantly improving the yield.
the lower cavity replacement developed by Chinsor Tech solves the problem of fast consumption of metal parts in high-corrosion plasma environment by using high-purity ceramic brittle materials and patented anti-etching coatings in key areas, and prolongs the cavity maintenance cycle by more than 1 times.
Suitable for mature 8-inch and 12-inch wafer production lines facing the pressure of cost reduction and efficiency enhancement and high operation and maintenance costs of production line equipment. By purchasing our high-quality replacement parts and retrofit services, fixed maintenance expenses are significantly reduced while maintaining the original production process window.
Applicable to global equipment service providers specializing in the renovation and sales of AMAT classic platforms (such as Centura 5200, Endura). We provide a complete and stable set of chambers, valves, heaters and transmission mechanisms, and are your reliable supply chain partner for the rapid delivery of high-quality refurbished equipment.
For first-line technologists working to remove bottlenecks in production lines and improve equipment stability (Uptime). We offer local chamber technology upgrades and wafer heater improvements that directly improve film uniformity and reduce dust (Particle) generation to meet stringent process specifications.
Applicable to scientific research and academic units equipped with AMAT research and trial production equipment. Our professional customized development and low MOQ limit can efficiently meet the diversified and customized hardware configuration requirements of laboratory equipment transformation, special gas process cavity upgrade and experimental device development.
After unpacking, the operator must carefully check the size parameters, hole distribution and seal groove size against the factory certificate (CoC) attached to the component to ensure that the spare part model completely matches the equipment cavity specification semiconductor the applied materials to be replaced.
the parts should be unpacked in a dust-free room of Class 100 and above, and the surface should be pre-wiped with semiconductor-grade high-purity isopropyl alcohol (IPA), and purged with high-purity nitrogen gun to remove particles, so as to avoid introducing dust pollution into the vacuum chamber during installation.
During the replacement of the cavity or Heater, a high-specification perfluoroether (FFKM) vacuum O-ring must be used. Bolt fastening shall strictly follow the principle of symmetrical and multi-step tightening (using torque wrench) to prevent vacuum leakage due to slight deformation of the sealing surface caused by uneven force.
after the installation is completed, the system is vacuumed and baked (Bake-out) for exhaust, and the helium mass spectrometer leak detector is used for overall air tightness test (the leak rate reaches the standard). Subsequently, the process is carried out to check the uniformity of film growth thickness and the level of particles in the film, and the production can only be connected to the grid after each index is qualified.
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Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
AMAT Centura 5200 and Endura series
Applicable equipment platform
8-inch integrated circuit thin film CVD and PVD cavity components
Core component process
PVD Wafer Heater independent heating technology
Wafer heating technology
Wuxi Zhanshuo