Applied Materials Semiconductor Equipment Spare Parts

Chinsortech supplies six AMAT-compatible chamber components by exact part number, with one-piece first-article orders, drawing-based quotation, made-to-order production and export packing for fab procurement teams comparing qualified second-source suppliers across multiple Applied Materials tool families. Equipment platform, process chamber, wafer size, revision, interface and material checks connect each selected plate, chamber or ESC to the correct installed configuration. Traceable inspection records and labeled maintenance kits reduce wrong-part risk and planned-maintenance delays.

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0040-43884 plate clamp lid for 300 mm eMax chamber, top view
0021-01569-001 CVD blocker plate, machined face view

Six-Part Chinsortech Supply Qualification

Product List

This page presents a selected six-part Chinsortech range for 300 mm chamber, plate and ESC sourcing; it does not represent every Applied Materials spare part. The range includes a clamp lid, blocker plate, process chamber, HDP-CVD cold plate, DPS electrostatic chuck and SSGD R2 lid plate, each kept under its complete part number.

RFQ Inputs for the Installed Configuration

A qualified RFQ includes the complete P/N and every REV letter or suffix, the tool family, process chamber, wafer size, required quantity and destination. Removed-part drawings, clear photos or a physical sample resolve configurations that cannot be identified from records alone. Chinsortech uses those inputs to define material, interfaces, ports, surface treatment, cleaning and inspection requirements before pricing.

One-Piece First Article Before Repeat Supply

Made-to-order parts can start with one piece. After drawing approval, the first article is checked for the dimensions, interfaces, surface condition and cooling, gas or vacuum features relevant to that component. The approved revision then becomes the reference for pilot and repeat lots, export packing and traceable order records.

Part-to-Chamber Compatibility Matrix

Product List

The part number is the primary key, followed by the process, wafer size, revision and physical interfaces. A shared Applied Materials platform name does not make chamber parts interchangeable.

Part numberComponentProcess or chamber contextSize or revisionFit evidence to check
0040-43884Plate clamp lideMax etch chamber300 mm (11.81 in)Clamp geometry, hole pattern and mating face
0021-01569-001Blocker plateCVD gas distributionDrawing controlledHole pattern, flatness, mounting face and finish
215-00042-000-A05Process chamberCVD chamber assemblyDrawing controlledFlanges, ports, sealing faces and mounting pattern
0040-45511 REV 003Cold plateHDP-CVD cooling300 mm (11.81 in); REV 003Cooling ports, passage test and bolt pattern
0040-77771DPS ESCDPS etch wafer clampingTool drawing and recipe controlledElectrical, vacuum, backside-gas and mounting connections
0021-39385-003SSGD R2 lid plateCentura 5200 DCVD recordR2 revision contextLid interface, sealing face and leak test

REV markings and suffixes remain exactly as supplied. Release requires comparison of the approved drawing or measured old part with the mounting pattern, sealing faces, ports, electrical connections, surface treatment and any cooling or gas passages used by the installed chamber.

Traceable Spares for Planned Maintenance

Product List

  1. Exact Service-Position Identification

    Each part is labeled with the complete P/N, revision, quantity, purchase reference and chamber or maintenance-event context. This separates similar-looking components that belong to different processes or hardware revisions.

  2. Release Against the Approved Drawing

    Inspection covers the dimensions and features that control fit: mounting and sealing interfaces, surface condition, cooling or gas passages and helium leak performance where applicable. Any reworked item returns to inspection before warehouse release.

  3. Clean Maintenance-Kit Packing

    Cleaned surfaces receive protective packing, double bags when the quotation specifies them and grouping by the planned maintenance event. The packing list and inspection report give receiving and maintenance teams a common traceability record before the chamber is opened.

Part Numbers and Chamber Configurations

These six Chinsortech parts cover selected 300 mm (11.81 in) chamber, plate, lid, cooling and electrostatic-clamping needs. Selection depends on the complete part number, chamber process, wafer size and revision; similar names across AMAT platforms do not establish interchangeability.

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0040-43884 plate clamp lid for 300 mm eMax chamber, top viewControls lid clamping geometry on the specified 300 mm eMax chamber configuration.

0040-43884 Plate Clamp Lid, 300 mm eMax

300 mm (11.81 in) eMax etch chamber clamp lid. Ordering accuracy depends on the full P/N and installed configuration.

  • Application / fit300 mm (11.81 in) eMax etch chamber clamp lid
  • Pressure / load range300 mm (11.81 in) wafer-class lid; clamp preload controlled by approved drawing
  • MaterialPrecision-cast aluminum alloy; hard anodized when specified
  • Interface standardP/N 0040-43884; eMax 300 mm (11.81 in) hole pattern and clamp geometry
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0021-01569-001 CVD blocker plate, machined face viewMatches the approved CVD hole pattern, mounting face and process-side surface condition.

0021-01569-001 Blocker Plate

CVD gas-distribution blocker plate. Ordering accuracy depends on the full P/N and installed configuration.

  • Application / fitCVD gas-distribution blocker plate
  • Pressure / load rangeDrawing-controlled flatness, hole pattern and process-side finish
  • MaterialPrecision-cast aluminum alloy; process-side finish per drawing
  • Interface standardP/N 0021-01569-001; CVD hole pattern and mounting face
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215-00042-000-A05 CVD process chamber assembly, exterior viewProvides the drawing-matched vacuum body, ports and mounting geometry for a CVD chamber build.

215-00042-000-A05 Process Chamber

CVD process chamber assembly. Ordering accuracy depends on the full P/N and installed configuration.

  • Application / fitCVD process chamber assembly
  • Pressure / load rangeHigh-vacuum chamber service; helium leak target ≤1×10⁻⁹ Pa·m³/s
  • MaterialMachined aluminum-alloy chamber body; surface finish per drawing
  • Interface standardP/N 215-00042-000-A05; chamber flanges, ports and mounting pattern
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0040-45511 REV 003 cold plate for 300 mm HDP-CVD, port-side viewPreserves the REV 003 cooling passages and mounting pattern for the 300 mm HDP-CVD configuration.

0040-45511 REV 003 Cold Plate, 300 mm HDP-CVD

300 mm (11.81 in) HDP-CVD chamber cooling plate. Ordering accuracy depends on the full P/N and installed configuration.

  • Application / fit300 mm (11.81 in) HDP-CVD chamber cooling plate
  • Pressure / load range300 mm (11.81 in) cooling duty; pressure test to approved drawing
  • MaterialPrecision-cast aluminum alloy with internal cooling passages
  • Interface standardP/N 0040-45511 REV 003; HDP-CVD ports and bolt pattern
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0040-77771 DPS electrostatic chuck assembly, wafer-contact surfaceMatches the DPS clamping surface, mounting pattern and service connections specified for the installed chuck.

0040-77771 DPS ESC

DPS etch electrostatic wafer chuck. Ordering accuracy depends on the full P/N and installed configuration.

  • Application / fitDPS etch electrostatic wafer chuck
  • Pressure / load rangeElectrostatic clamping; voltage and backside-gas limits follow the approved tool drawing
  • MaterialCeramic clamping surface with metal base assembly
  • Interface standardP/N 0040-77771; DPS electrical, vacuum and backside-gas connections
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0021-39385-003 SSGD R2 chamber lid plate for Centura 5200 DCVDMatches the SSGD R2 sealing face and lid interface identified for the Centura 5200 DCVD record.

0021-39385-003 Lid Plate SSGD R2 Chamber

Centura 5200 DCVD SSGD R2 chamber lid. Ordering accuracy depends on the full P/N and installed configuration.

  • Application / fitCentura 5200 DCVD SSGD R2 chamber lid
  • Pressure / load rangeVacuum lid sealing duty; helium leak target ≤1×10⁻⁹ Pa·m³/s
  • MaterialMachined aluminum-alloy lid plate; hard anodized when specified
  • Interface standardP/N 0021-39385-003; SSGD R2 chamber lid interface
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Ordering and Delivery

Supply can begin with one drawing-approved part and progress to pilot and repeat orders under the same revision record.

First Article: 1 Piece

MOQ 1 pc. Quoted by complete P/N and approved drawing. Typical production is 10–15 business days for plates and lids, or 15–40 business days for chambers and ESC assemblies.

Pilot Batch: 2–9 Pieces

Quantity-based quotation with dimensional, visual and interface inspection. Typical production is 15–30 business days after material and drawing approval.

Repeat Supply: 10+ Pieces

Contract pricing follows an approved first article. The initial schedule is typically 30–60 days; replenishment slots are agreed for planned maintenance demand.

Production After Drawing Approval

No unverified stock claim is used. Production starts after revision, drawing and material approval. Urgent requirements are reviewed against capacity and material availability.

DHL, UPS, FedEx or CIF Port Delivery

DHL, UPS or FedEx can serve small shipments; larger lots can move by ocean freight. A CIF quotation requires the named destination port.

Order Documents

Standard delivery includes a commercial invoice, packing list and inspection report. Material or traceability records are supplied when included in the quotation.

Drawing-Based Fit Review

The review accepts an old-part drawing or reference file with the complete P/N, revision and required quantity. Chinsortech uses these inputs to verify dimensions, interfaces, ports, materials and surface requirements before quotation.

Accepted files: PDF, DWG, DXF, STEP, STP, JPG, JPEG or PNG, up to 10 MB. Contact details and files are used only to prepare this enquiry.

Questions About Fit, Records and Delivery

These answers define the information required for a complete spare-part enquiry before production starts.

How do you prevent a wrong fit when two parts share an Applied Materials platform name?

We match the complete part number, including every REV letter or suffix, then compare the tool family, process chamber, wafer size, mounting pattern, ports and material against the approved drawing or the removed part. A platform name alone is not accepted as interchangeability evidence.

What can I send when the old part number is unreadable?

Useful evidence includes clear photos of every face, overall and interface dimensions, the equipment and chamber model, wafer size and any drawing or maintenance record. If those records are insufficient, a physical sample can be measured before a quotation is finalized.

How are vacuum-facing parts cleaned and packed?

The quotation defines the required surface finish, cleaning method and packaging level. Finished parts receive visual and dimensional release checks, then are protected, double-bagged when specified and labeled with the part number, revision and order reference.

What warranty applies to these made-to-order spare parts?

The standard quotation uses a six-month manufacturing-defect warranty from shipment. Process contamination, incorrect installation, misuse and unapproved chamber modifications are excluded; any special warranty must be written into the purchase specification.

What information is required for a CIF quotation?

A CIF quotation requires the exact part number and revision, quantity, destination port, requested delivery date and any packing or documentation requirements. Chinsortech then quotes the product, freight and insurance for that named port.

Part-Number and Fit Review

A complete enquiry includes the P/N, revision, tool and chamber context, wafer size, quantity and destination. A drawing or old-part photo resolves uncertain installed configurations.

  • Phone: +86 180 1535 4460
  • Email: [email protected]
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

Your contact details are used only to prepare and follow up this product enquiry.