6-Inch Shutter DiskA 6-inch shutter disk listed for Endura 5500 PVD. Use PN 0020-26583 to distinguish it from the TI and Advanced 101 shutter disk configurations below.PN0020-26583ComponentShutter diskWafer size6-inchToolEndura 5500 PVDCondition2nd Source NewRequest This PartView Product
6-Inch TI Shutter DiskA TI shutter disk for a 6-inch Endura 5500 PVD configuration. PN 0020-26971 is the identifying reference for this listed component.PN0020-26971ComponentTI shutter diskWafer size6-inchToolEndura 5500 PVDCondition2nd Source NewRequest This PartView Product
6-Inch Advanced 101 Shutter DiskA 6-inch shutter disk identified for an Advanced 101 configuration on Endura 5500 PVD. Use PN 0020-28392 when requesting this version.PN0020-28392ComponentAdvanced 101 shutter diskWafer size6-inchToolEndura 5500 PVDCondition2nd Source NewRequest This PartView Product
6-Inch SMF PedestalA 6-inch SMF pedestal listed for Endura 5500 PVD. Match PN 0020-27869 with the installed chamber configuration and old-part identification.PN0020-27869ComponentSMF pedestalWafer size6-inchToolEndura 5500 PVDCondition2nd Source NewRequest This PartView Product
8-Inch SNNF TI Clamp RingAn 8-inch SNNF TI clamp ring listed for Endura 5500 PVD. PN 0020-27702 identifies this listed size and configuration.PN0020-27702ComponentSNNF TI clamp ringWafer size8-inchToolEndura 5500 PVDCondition2nd Source NewRequest This PartView Product
Clamp RingA clamp ring listed for Endura 5500 PVD under PN 0020-264746. Provide the complete old-part marking and chamber configuration when requesting this component.PN0020-264746ComponentClamp ringToolEndura 5500 PVDCondition2nd Source NewRequest This PartView Product