applied materials parts

Chinsortech supplies the six Endura 5500 PVD parts listed below as 2nd Source New. Match your shutter disk, pedestal, or clamp ring using its full part number, configuration description, and installed-part records.

Chinsortech is the brand of Wu Xi Chinsor Technology Co., Ltd., a semiconductor equipment parts manufacturer in Wuxi, China.

Start With the Full Part Number

The full part number (PN) is the starting point for matching an Endura 5500 part. Copy every digit and include the revision or suffix shown on the label, drawing, or parts list. A missing digit or a different revision needs to be resolved before the item can be identified for an order.

Use the equipment records to connect that PN to its installed configuration:

  1. Identify the Endura 5500 system and the specific PVD chamber.
  2. Record the process kit or assembly position and wafer size.
  3. Compare the installed PN and revision with the candidate product and its configuration description.

For a tool that has been upgraded or refurbished, use the current installed configuration and change records. An original equipment description may refer to hardware that has since been replaced.

Start a Part-Matching Inquiry

Read the Configuration Terms Before Choosing

The three shutter disks below all carry a 6-inch description, but their part numbers and descriptions differ. Use the exact wording from your parts list to distinguish the candidates.

Shutter Disk PNDescription to Match
0020-265836″ Shutter Disk1
0020-269716INCH TI SHUTTER DISK
0020-28392DISK, 6″ ADVANCED 101 SHUTTER

Keep TI and ADVANCED 101 in the inquiry when those terms appear in your records. Wafer size alone does not resolve which of these three disks your chamber uses.

The pedestal listing identifies 0020-27869 as 6INCH SMF. The 0020-27702 clamp ring identifies 8INCH SNNF TI. Preserve SMF, SNNF, and TI exactly as recorded so the inquiry retains the configuration details that distinguish each item.

The 0020-264746 clamp ring listing does not specify a wafer size. Supply the size from your installed-tool records, together with a clear PN label photo, when requesting this ring.

Endura 5500 PVD Parts to Match

Include the selected PN in your inquiry to keep the product reference connected to the supporting records.

Build an Evidence Set for an Unclear Part

If the label is incomplete or the purchasing record conflicts with the installed part, send the available evidence together. Keep uncertain characters marked as unreadable so the matching review can address the gap.

EvidenceWhat to Include
IdentityA close-up of the complete label or marking, including the PN, revision, suffix, and barcode where present
Part AppearanceClear views of the whole part, both faces, and its mounting or locating features
Installed ContextChamber name, assembly position, parent assembly PN if known, and the tool's current wafer size
Technical RecordsThe relevant parts-list or assembly-drawing reference, document number, revision, and applicable change record
DimensionsAvailable drawings or recorded interface dimensions that distinguish the candidate part

Use a parts list or drawing that corresponds to the current chamber configuration. A platform-level Endura document may cover a different generation or chamber, leaving the actual part assignment unresolved.

Make the RFQ Ready for Technical Review

A request for quotation (RFQ) should connect the requested item, its supporting evidence, and the conditions your team will use to approve it. Keep one line item per PN and revision so quantities and acceptance requirements stay attached to the correct part.

RFQ RecordInformation to Capture
Item IdentityRequested PN, revision or suffix, full description, and 2nd Source New condition
Configuration MatchEndura 5500 chamber, process kit or assembly position, wafer size, and the records used for identification
Acceptance RequirementsApplicable drawing revision, critical dimensions, material and surface requirements, and relevant cleanliness, vacuum, thermal, or functional criteria
DocumentationRequired inspection or traceability records, with the PN, revision, batch, and quantity they must identify
Commercial ScopeQuantity, delivery destination, requested delivery date, packaging requirements, and quotation terms

For a second-source part, mechanical fit is one part of the review. Material, surface condition, and the chamber's operating environment also affect the acceptance criteria. Provide the requirements relevant to your process so the proposed supply scope can be reviewed against them.

Confirm the required documents and inspection scope during quotation. If a candidate changes a specified material, coating, geometry, or other process-relevant feature, record that difference for your technical team's approval before ordering.

Send Part-Matching Inquiry

Part-Matching Inquiry

Send Your Endura 5500 Part Records. Send the full PN and available records to Chinsortech for part identification and quotation review. For several parts, attach a line-item list with the quantity and supporting files for each PN. Include: full PN and any revision or suffix; Endura 5500 configuration and chamber or assembly position; wafer size; old-part label photos, part photos, and relevant drawing or parts-list references; quantity and delivery destination; documentation and acceptance requirements, where applicable. Contact Name; Company; Email; Phone / WhatsApp; Part Number and Revision; Quantity; Delivery Destination; Configuration and Matching Details.

  • Phone: 18015354460
  • Email: [email protected]
  • WhatsApp: 18015354460
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

Include the chamber or assembly position, wafer size, and any characters you cannot read on the label. Describe the available photos or documents and the acceptance requirements your team needs reviewed.