amat parts

Second-Source Semiconductor Equipment Components

Find AMAT parts by part number, tool family, chamber configuration, wafer size, and installed revision. Chinsortech manufactures and supplies second-source new components for selected legacy semiconductor equipment, including Centura 5200 CVD and DPS configurations.

Start with the six featured parts below or send us the label, old-part photos, drawing, quantity, and target tool. We will use those identifiers to identify the exact part and prepare the quote.

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5000/5200 WXZ chamber second-source new part for Centura 5200 CVD equipment

Find AMAT Parts by Part Number, Tool and Chamber

“AMAT parts” covers components used across multiple semiconductor process platforms, chambers, wafer sizes, and hardware generations. A platform family such as Centura narrows the search, but the installed process chamber and hardware configuration determine which part can be evaluated for replacement.

Chinsortech’s broader product records include chamber bodies, liners, shields, faceplates, blocker plates, pedestals, rings, manifolds, lid plates, adapters, blades, lift components, heaters, and insulators. The featured selection on this page concentrates on six second-source new components associated with Centura 5200 CVD and DPS applications.

Part categoryTypical role in the toolIdentification details that matter
Chamber and chamber assemblyProvides or supports the controlled process or cooldown spacePart number, process chamber, tool generation, wafer size, interfaces, installed revision
Gas box, manifold, and perforated plateSupports gas delivery or distribution at the identified assembly positionPart number, gas-path configuration, port pattern, material, surface condition, process chemistry
Cover and lid componentCloses, protects, or locates the corresponding upper assemblyPart number, chamber version, sealing and locating features, dimensions, surface treatment
Robot or transfer bladeTransfers a wafer between compatible positions in the toolPart number, wafer size, robot and chamber configuration, geometry, mounting interface, clearance
View the Six Featured AMAT Parts

Compatibility Starts with the Installed Configuration

A matching part number is the strongest starting point, but it should be checked against the installed tool. The same platform family can carry different process chambers, wafer sizes, kits, interfaces, and hardware revisions. Tools that have been upgraded or refurbished may also differ from their original build record.

Use this identification sequence

  1. Read the part identity. Record the complete part number, suffix, revision, description, and any barcode or label information.
  2. List the installed configuration. Provide the platform, mainframe generation, process type, complete chamber name, wafer size, and known process kit.
  3. Document the installed hardware. Add equipment serial information when available, photos of the installed and removed part, mounting location, interface measurements, and modification history.
  4. Specify inspection requirements. Identify the required material, surface treatment, cleanliness, vacuum or gas-path checks, inspection report, packaging, and quantity.
  5. Resolve differences before ordering. Compare the drawing or approved sample with the proposed part. A similar name or appearance does not establish interchangeability.

If the label is missing, an approved drawing or identified physical sample can serve as the quotation reference; photographs and measured interfaces can help narrow the candidate part. The purchase order should name the drawing revision or sample ID that governs final inspection.

Submit Part Identification Details

What We Verify Before a Second-Source Part Is Released

Wuxi Chinsor Technology Co., Ltd. develops and manufactures semiconductor equipment parts under the Chinsortech brand. Its product scope includes PVD, CVD, and etch equipment spares and mechanical components. A part-specific inspection plan turns the agreed drawing, sample, and acceptance conditions into release checks.

Identity and traceability

The release record starts with the part number, revision, description, quantity, supply condition, and production or inspection batch. Certificates and inspection records should reference the specific part and batch they cover.

Dimensions and interfaces

Critical dimensions are checked against the approved drawing or agreed sample. The relevant inspection points may include locating surfaces, sealing faces, threads, ports, water or gas passages, mounting features, and robot clearances. Mechanical fit alone does not establish vacuum, thermal, gas-path, electrical, or process performance.

Material, surface, and cleanliness

Material and surface treatment are confirmed from the purchase specification. Visual inspection covers damage, corrosion, residue, coating defects, particles, discoloration, and sealing-surface condition. Parts exposed to vacuum, process gases, or critical chamber environments require cleanliness and contamination criteria defined for that application.

Functional checks

The functional test follows the part’s role. A vacuum or gas-path component may require leak or pressure-related acceptance criteria; a moving assembly may require motion, position, repeatability, or clearance checks; an electrical or thermal component requires the corresponding electrical, insulation, signal, or temperature criteria.

Discuss Your Inspection Requirements

From Part Identification to Shipment

1. Identification review

Chinsortech compares the inquiry with its product records and returns either a candidate match or the specific questions needed to identify one.

2. Technical and commercial quotation

After the part and requested supply conditions are clear, Chinsortech issues a technical and commercial quotation for review.

3. Drawing or sample confirmation

For a build-to-drawing or sample-based part, the buyer approves the drawing revision or sample ID and its acceptance points before production release.

4. Production, inspection, and packing

Production, inspection, and packing follow the approved technical and quality requirements. Shipment preparation begins after the required records are complete.

5. Shipment and receiving check

Chinsortech releases the shipment with the agreed commercial and quality documents. The buyer receives it under the site’s receiving and installation procedures.

Quote comparison checklist

Compare this itemConfirm in the supplier quote
Part identityComplete PN, revision, description, tool and chamber scope
Supply conditionSecond-source new, refurbished, repaired, or cleaned
Technical scopeMaterial, surface treatment, critical dimensions, interfaces and approved reference
Quality scopeInspection points, acceptance criteria, report or certificate, and traceability fields
Commercial scopeQuantity, unit and total price, payment and trade term, packaging, freight and taxes
ScheduleDrawing approval timing, production lead time, inspection time, ship date and transit basis
Request a Configuration-Based Quote

Send Your AMAT Parts Requirement

Use this form to request a part match and quote. Our team will respond with the identified item, any open technical questions, and the next commercial step. Need to send labels or old-part photos? Email [email protected] or contact us on WhatsApp at 18015354460.

  • Phone: 18015354460
  • Email: [email protected]
  • WhatsApp: 18015354460
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

Include the PN and revision, target tool and chamber, wafer size, quantity, delivery destination, required date, inspection requirements, and links or references to labels, photos, or drawings.