amat equipment spare parts

Chinsortech manufactures new 2nd-source mechanical parts for selected Applied Materials semiconductor equipment configurations. The current range includes robot wrist components, chamber parts, a 300 mm eMax clamp lid, and an HDP-CVD cold plate.

Send the full part number, revision, platform, process chamber, wafer size, quantity, and a photo of the installed part. We use that data to identify the correct drawing and prepare a configuration-specific quotation.

Request a Parts Quote
Chinsortech 215-00042-000-A05 process chamber spare part

Identify the Installed Part Before Comparing Replacements

AMAT equipment names describe a broad installed base, not one interchangeable hardware set. Endura, Centura, Producer, and Precision 5000 platforms can carry different PVD, CVD, etch, thermal, or transfer configurations. A platform match alone cannot confirm a chamber part, robot component, plate, or cold plate.

Start with the complete label on the removed part. Preserve every suffix and revision mark, then match the process chamber, wafer size, assembly position, and installed hardware version. For a part without a readable label, provide photographs of the full part, interfaces, fastener pattern, and any mating assembly.

Identification fieldWhy it changes the match
Part number and revisionSeparates drawing versions and prevents a base number from being treated as a complete identifier.
Platform and chamberDistinguishes the host system from the specific process or transfer module.
Process and wafer sizeSeparates PVD, CVD, HDP-CVD, and etch hardware as well as 150 mm, 200 mm, and 300 mm variants.
Assembly positionClarifies top versus base wrist parts, lids, plates, liners, and other location-specific components.

RFQ Inputs for a Configuration-Specific Quote

A complete RFQ lets the supplier check the drawing, manufacturing scope, inspection requirement, packing, and delivery condition before pricing.

Equipment and part identity

Provide the platform, chamber or subsystem, full part number, revision, description, wafer size, quantity, and required condition. Include the equipment nameplate and old-part label when they are available.

Technical acceptance

State the drawing revision, material, coating or surface treatment, cleanliness and packaging requirements, dimensional report, certificate needs, and any agreed fit or interface checks.

Commercial and delivery data

Specify the destination, requested delivery date, trade term, and destination port for a CIF request. Pricing depends on the exact part, material, quantity, shipping, and verification scope.

Send Your Part Number

Available AMAT Equipment Spare Parts

These six products retain the order and URL-to-image pairing supplied for this page. Final fit requires confirmation against the installed configuration and the complete part identifier.

Select by Process, Platform, and Assembly Position

The supplied list spans transfer-robot, etch, CVD, and HDP-CVD hardware. Compare each candidate only within the configuration described by its part number and supporting equipment record.

CandidateKnown contextRFQ confirmation
0021-37496 REV A / 0021-37495 REV.001Top and base wrist positions; Centura 5200 HDP-CVD mappingRobot assembly, wrist position, full revision, mating interfaces
0040-43884300 mm eMax etch clamp-lid plateeMax chamber configuration, lid interface, revision evidence
0021-01569CVD blocker plate; client list contains 0021-01569-001Full suffix, chamber, wafer size, old-part label
215-00042-000-A05Process chamber listed in the CVD categoryTarget tool, chamber function, interfaces, acceptance scope
0040-45511 REV 003300 mm HDP-CVD cold plateRevision, cooling interfaces, mounting pattern, installed configuration

Inspection Records Should Follow the Drawing and Revision

Chinsortech's documented production flow places inspection at incoming material, manufacturing completion, and post-rework stages. Nonconforming parts move to rework, return, or scrap instead of entering inventory as accepted goods.

The supplied process summary does not define one universal inspection method or tolerance set for every spare part. Add the required drawing revision, measurement points, material evidence, surface-treatment requirements, cleanliness criteria, and report format to the purchase specification so the acceptance record matches the quoted component.

  • Preserve the complete part number and revision on the inspection record.
  • Define dimensional and interface checks from the approved drawing or sample.
  • State certificate, material, coating, cleanliness, and packaging evidence required with shipment.
  • Require re-inspection after any approved rework.

Quotation, Packaging, and Delivery Scope

The quotation should connect the identified part to a defined commercial and delivery scope.

Quotation basis

Chinsortech prices against the confirmed part, revision, quantity, material and surface requirements, inspection scope, and destination. The quote should state the supplied condition and any exclusions from the requested acceptance package.

Packing and shipping

Specify cleanliness protection, contact-surface protection, moisture control, labeling, and custom crate or carton requirements. For CIF pricing, provide the destination port.

Receiving check

At receipt, compare the label, revision, quantity, packaging condition, and accompanying records with the purchase order before the part enters the installation workflow.

AMAT Spare Parts FAQ

Short answers for common sourcing and compatibility questions.

Are these Applied Materials OEM parts?

The products on this page are identified as new 2nd-source parts manufactured and supplied by Chinsortech. The RFQ and purchase order should preserve that supply condition.

Can the platform name alone confirm fit?

No. Confirm the full part number, revision, process chamber or subsystem, wafer size, assembly position, and installed configuration. A shared Endura or Centura platform name does not make internal parts interchangeable.

What should I send if the old part label is unreadable?

Send the equipment nameplate, chamber or subsystem identity, overall and interface photographs, dimensions available from the approved drawing, the installation position, quantity, and a description of the replacement need.

How is lead time confirmed?

Lead time is confirmed after the exact part, revision, quantity, manufacturing and inspection scope, packing, and destination are defined in the quotation.

Request an AMAT Spare Parts Quote

  • Phone: 18015354460
  • Email: [email protected]
  • WhatsApp: 18015354460
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

Include the full part number and revision, platform, chamber or subsystem, wafer size, quantity, required condition, destination, and requested delivery date. Add old-part and interface photos when the label or configuration is uncertain.