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We provide high-performance precision components for AMAT Endura 5500 platform, including heating plates, vacuum chambers and automation components, to help equipment achieve stable and high-yield thin film deposition. Chinsor Tech is a source manufacturing plant with independent research and development capabilities. It strictly controls the process accuracy through its own production line and eliminates the agent price difference to ensure that it provides you with a very competitive ex-factory price and an agile delivery cycle.
AMAT Endura 5500 is mainly used in the physical vapor deposition process of 8-inch wafers, advanced package interconnect manufacturing, power device metallization, and old machine performance upgrades and refurbishment.
aviation-grade aluminum and nano-scale CNC machining technology are adopted, and the tolerance of key fit positions is controlled within 0.01mm, thus ensuring zero error installation on AMAT Endura 5500 platform and greatly reducing equipment debugging time.
99.7% purity alumina ceramics are selected, and the breakdown voltage is higher than 20 kV, which effectively solves the problem of ignition in PVD high-voltage environment and extends the average replacement cycle of components by more than 50%.
Through the patented design of the internal heating wire track, the temperature uniformity of the 8-inch wafer surface is increased to less than 1.5 percent, significantly improving the consistency of film thickness and increasing the yield of wafer flow.
the flange seal is electrochemically polished, and the surface roughness is lower than Ra 0.2, which ensures that the system has no leakage for long-term operation under ultra-high vacuum of 10-9 Torr and ensures the extremely pure deposition environment.
the inner wall of the cavity adopts special plasma spraying technology, which has strong adhesion and wear resistance, effectively reduces the particle generation rate, and increases the preventive maintenance interval of the machine from 500 hours to 800 hours.
Based on in-depth analysis of the AMAT Endura 5500 system architecture, all robotic arm components and sensor interfaces have been verified by 1-to -1 simulation, solving the difficult industry problem of finding discontinued spare parts.
Chinsor Tech’s remanufactured components for the AMAT Endura 5500 incorporate next-generation thermal simulation technology. Compared with the original equipment manufacturer’s earlier design, this approach significantly reduces localized thermal stress concentrations during high-power sputtering, thereby extending component life by approximately 30%. Meanwhile, we have optimized the structure of key moving components using 52 proprietary patented technologies, thereby reducing particulate contamination caused by mechanical friction.
By adopting a direct-from-factory sourcing model, Chinsor Tech has reduced refurbishers’ component procurement costs by more than 40%, thereby resolving the challenge faced by integrators in the used equipment market—namely, the erosion of profit margins due to expensive original-equipment manufacturer (OEM) spare parts.
In response to the common problem of imported spare parts in the market that the delivery time is several months, we have established a standing inventory plan for AMAT Endura 5500 in China, which solves the risk of the entire line being shut down due to the shortage of one seal.
by providing heating uniformity improvement parts with better performance than the original one, we have solved the problem that the thickness uniformity of the old machine often meets the standard when running advanced processes, and let the old machine glow with new production capacity.
enterprises specializing in AMAT Endura 5500 2 mobile phone recycling and renovation need to purchase precision components with high cost performance, stable quality and perfect replacement of the original factory in large quantities.
a technical expert who is responsible for restoring the old machine to the factory state. They have extremely strict technical requirements on the tolerance accuracy, material properties and installation convenience of parts.
the person in charge of managing the mature process production line, hoping to find a reliable source of domestic spare parts to reduce the production cost of each wafer on the premise of ensuring process stability.
partners who distribute high-quality semiconductor spare parts to the global market, seeking source factories with ISO 9001 certification and strong R & D background to provide long-term stable supply.
all spare parts for AMAT Endura 5500 must be unpacked in a clean room of 1000 grade and above, and the connection interface must be deeply cleaned with isopropyl alcohol and high purity nitrogen before installation.
When installing the heating base or robot arm, a dial indicator must be used for horizontal calibration to ensure that the parallelism tolerance is within 0.02mm. Forced tightening in the case of misalignment is strictly prohibited.
After the system is assembled, a vacuum test shall be carried out for at least 12 hours, and a helium mass spectrometer leak detector shall be used for static detection of each connection point to confirm that the leak rate is lower than the specified standard.
after replacing the key parts, it is necessary to run the standard test piece for temperature control and deposition rate calibration, and fine-tune the PID parameters according to the measured results until the process indicators meet the production requirements.
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Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
8 inches
Fit size
10-9 Torr
Vacuum degree
450 degrees Celsius
Heating temperature
Wuxi Zhanshuo