Amat Chamber

Supply scope
New second-source chamber assemblies
Platform context
Centura 5200 DCVD and Endura 5500 PVD
Fit basis
Part number, chamber duty, revision and interface verification
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AMAT chamber assembly overview
DXZ TEOS AMAT chamber assembly

From USD 28,000 / assembly

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Source new second-source AMAT chamber assemblies by verified part number and process role. This selection covers Centura 5200 DCVD and Endura 5500 PVD duties including TEOS, SiN, degas and cooldown modules, with fit review based on platform, revision, interfaces and acceptance requirements.

Chamber Process Roles And Platform Mapping

Product List

An AMAT chamber is a process-specific vacuum module, not a universal enclosure. A deposition or process chamber controls the reaction environment around the wafer; a degas chamber removes moisture and volatile residues before a downstream step; a cooldown chamber brings wafers to a controlled handling temperature after processing. Those duties determine the chamber geometry, utilities, internal surfaces and interface requirements.

Centura 5200 DCVD assemblies

The listed DXZ TEOS and DXZ SiN chamber assemblies serve distinct CVD applications, while the single-slot and multi-slot cooldown assemblies support post-process wafer handling. TEOS identifies the oxide precursor application, SiN identifies silicon-nitride deposition, and RPS denotes the remote plasma source named on the TEOS record; DXZ remains the product-family identifier. Interchangeability is established from the part number, chamber position and hardware revision.

Endura 5500 PVD assemblies

The listed degas chamber supports the Endura 5500 PVD platform context. The separate process chamber listing carries a part-number-led fit record, with platform and installation evidence established during quotation. Each chamber remains an identified assembly with a defined supply scope.

The Fit Record Before Ordering

Product List

The fit record begins with the platform and mainframe and includes the process chamber family, wafer size, original part number, revision and physical chamber position. Identification-label photographs, views of the old assembly and connection faces resolve cases where the label alone is incomplete. A drawing or representative sample provides a further reference for ambiguous geometry.

The commercial and technical scope identifies whether the requirement is a complete chamber assembly, a chamber body or a partial module. Critical dimensions, transfer and vacuum interfaces, gas and cooling connections, electrical and sensor connections, material and surface treatment, cleanliness class, temperature range and process chemistry form the quotation basis. Quantity, supply condition, included hardware, inspection documents, packaging, destination and requested delivery date then remain tied to one controlled fit record.

Cleanliness And Restart Risk Controls

Product List

Incoming and final inspection links the part number, revision, batch and quantity to the physical assembly and its records. Visual checks cover impact damage, scratches, corrosion, residue, coating condition and transport damage; dimensional checks focus on the approved drawing and the sealing, locating, threaded and utility interfaces that matter for installation.

Vacuum hardware receives duty-specific testing. Seal condition, leakage or pressure-hold checks, passage cleanliness and functional tests use limits from the equipment or customer specification. Particle or surface-contamination methods follow the chamber material, contact media and process sensitivity, so the test method and acceptance limit belong in the order requirements.

After inspection, cleaned surfaces and critical ports receive protective packaging, and traceable records travel with the assembly. This gives the maintenance team a clear basis for receiving inspection, chamber installation and controlled restart.

AMAT Chamber Assembly Selection

These new second-source assemblies cover distinct CVD, process, cooldown and degas duties. Each product record identifies its part number, platform context, chamber position and interface set for a controlled quote.

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0010-35756 CVD cooldown chamber assemblyNew second-source CVD cooldown assembly for a Centura 5200 DCVD fit review.

0010-35756 CVD Cooldown Chamber Assembly

This assembly serves an installed tool record carrying the listed CVD cooldown chamber part number.

  • Application / fitCentura 5200 DCVD; CVD cooldown duty
  • Pressure / load rangeVacuum process chamber; operating envelope follows the tool recipe
  • MaterialAlimex precision cast aluminum plate (page-listed)
  • Interface standardPlatform-specific vacuum, cooling and transfer interfaces defined by the drawing and revision

From USD 28,000 / assembly

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0290-35673-03 DXZ TEOS chamber assembly with RPSNew second-source DXZ TEOS chamber assembly with RPS for Centura 5200 DCVD verification.

0290-35673-03 TEOS Chamber Assembly With Remote Plasma Source

This assembly serves a tool record carrying the listed DXZ TEOS chamber with RPS.

  • Application / fitCentura 5200 DCVD; DXZ TEOS process duty
  • Pressure / load rangeVacuum CVD process duty; recipe and RPS limits follow the tool specification
  • MaterialAlimex precision cast aluminum plate (page-listed)
  • Interface standardDXZ chamber and RPS interfaces defined by the drawing, utilities and revision

From USD 95,000 / assembly

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0290-35673-01 DXZ SiN chamber assemblyNew second-source DXZ SiN chamber assembly matched by part number and chamber position.

0290-35673-01 Silicon Nitride Chamber Assembly

This assembly serves a DXZ SiN requirement with an installed platform record.

  • Application / fitCentura 5200 DCVD; DXZ SiN process duty
  • Pressure / load rangeVacuum CVD process duty; recipe and temperature limits follow the tool specification
  • MaterialAlimex precision cast aluminum plate (page-listed)
  • Interface standardDXZ chamber, gas and transfer interfaces defined by the drawing and revision

From USD 78,000 / assembly

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215-00042-000-A05 process chamberNew second-source process chamber supplied against a controlled fit record.

215-00042-000-A05 Process Chamber Assembly

This assembly serves a target record carrying the exact process chamber part number.

  • Application / fitAMAT process-chamber replacement; platform and position are part of fit review
  • Pressure / load rangeProcess-specific vacuum duty; operating envelope follows the approved tool specification
  • MaterialAlimex precision cast aluminum plate (page-listed)
  • Interface standardChamber position, vacuum, gas, cooling and electrical interfaces defined by the drawing

From USD 55,000 / assembly

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0010-37264 multi-slot cooldown chamber assemblyNew second-source multi-slot cooldown assembly for Centura 5200 DCVD review.

0010-37264 Multi-Slot Cooldown Chamber Assembly

This assembly serves an installed chamber position requiring the listed multi-slot configuration.

  • Application / fitCentura 5200 DCVD; multi-slot cooldown duty
  • Pressure / load rangeVacuum handling and cooldown duty; slot configuration follows the tool record
  • MaterialAlimex precision cast aluminum plate (page-listed)
  • Interface standardMulti-slot transfer, cooling and vacuum interfaces defined by the drawing and revision

From USD 32,000 / assembly

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0020-70376 Endura 5500 PVD degas chamberNew second-source degas chamber for an Endura 5500 PVD fit review.

0020-70376 Degas Chamber Assembly

This assembly serves a tool record identifying the listed Endura 5500 PVD degas chamber.

  • Application / fitEndura 5500 PVD; degas duty
  • Pressure / load rangeVacuum degas duty; temperature and pressure limits follow the tool specification
  • MaterialAlimex precision cast aluminum plate (page-listed)
  • Interface standardEndura 5500 degas, vacuum, transfer and utility interfaces defined by the revision

From USD 42,000 / assembly

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Supply And Delivery Terms

Prices shown in the product cards are indicative starting points only; final scope, quantity, inspection, destination and logistics terms are confirmed during quotation.

Reference-unit review

Complete chamber assemblies are quoted from the supplied part number, quantity and required inspection evidence.

Pilot or replacement quantity

Pilot and replacement quantities are quoted per assembly scope, inspection requirement, packing method and destination.

Repeat supply

Repeat supply terms cover quantity breaks, capacity and replenishment timing for the identified assembly.

Made to order / quote-confirmed lead time

Supply status and delivery timing are stated in the quotation for the identified assembly and destination.

Global shipping by agreed trade terms

Global shipping is available under agreed trade terms; a destination port and Incoterm establish the freight basis.

Traceable inspection package

The order package can include the applicable packing list, inspection report, material or surface-treatment records and acceptance evidence.

Drawing-Based Fit Review

Files are used for fit review and quotation; send only the technical information needed for this request.

AMAT Chamber Buying Questions

Answers below summarize the fit, price, inspection and drawing information used for this chamber selection.

Which details are needed to match an AMAT chamber assembly?

The fit record includes the platform and mainframe, process duty, chamber position, wafer size, exact part number, revision and clear photos or drawings of the installed interfaces.

Are these chamber assemblies interchangeable across AMAT platforms?

No. Fit follows the process role, chamber version, part number, revision, interfaces and acceptance requirements, rather than the platform name alone.

How is the final price confirmed?

The displayed amounts are indicative starting points. The final quote covers the exact assembly scope, condition, materials, inspection, quantity, destination and logistics terms.

What inspection information can be requested?

The order can define identity and revision traceability, visual and dimensional checks, seal and interface checks, and duty-specific vacuum, function or cleanliness evidence.

Can I send a drawing or reference sample?

Yes. The normal inquiry form accepts a drawing or reference file together with quantity and work email so the required chamber scope can be reviewed.

Tell Us The Equipment, Condition And Quantity.

  • Phone: 18015354460
  • Email: [email protected]
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

We use the submitted details only to review this chamber requirement and prepare a quotation.