amat chamber

Source complete and functional chamber assemblies for specific Applied Materials configurations. Chinsortech supplies the five listed options for Centura 5200 DCVD, Endura 5500 PVD, and configuration-specific replacement projects.

Send the installed part number, tool, process, wafer size, and photos so the replacement scope can be checked before quotation.

Request an AMAT Chamber Quote
Open metal AMAT chamber assembly with perforated lid and machined interior

AMAT Chamber Supply for Identified Configurations

An AMAT chamber is not one universal product. Applied Materials platforms use different process, transfer, cooldown, and degas chambers, and the hardware can change with tool generation, process, wafer size, and revision.

This page covers the five chamber assemblies listed below. The supply scope can include a complete listed assembly or an identified replacement built around the existing part record, drawings, or sample. Chamber bodies, liners, rings, gas boxes, faceplates, and other internal parts remain separate items unless a quotation names them.

Match the Chamber Before You Order

Use the installed tool record and the old chamber identification together. A platform name alone does not establish compatibility.

Match pointWhat to provideWhy it changes the selection
Part number and full suffixNameplate, BOM, maintenance record, or existing labelSimilar chamber names can map to different hardware records.
Platform and processCentura 5200 DCVD, Endura 5500 PVD, or the exact installed toolThe same platform family can carry CVD, PVD, etch, cooldown, degas, or other chamber functions.
Wafer sizeInstalled wafer diameter and chamber configurationChamber body, lift, ring, gas distribution, and interface dimensions may change with wafer size.
Revision and interfacesREV level, ports, valve positions, utilities, connectors, and mating surfacesMechanical and utility interfaces must match the installed subsystem.
Visual and dimensional evidenceOverall photos, nameplate, critical dimensions, and damaged or missing areasEvidence resolves incomplete or outdated records before manufacturing and inspection.

Available AMAT Chamber Assemblies

Review the five specified chamber records below. Confirm the installed configuration before ordering.

Rectangular machined aluminum process chamber body with open top and side port

215-00042-000-A05 PROCESS CHAMBER 2nd Source New

A process chamber listed under part number 215-00042-000-A05. The current product record does not state a tool mapping, so the installed platform, process, interfaces, and dimensions must be confirmed.

  • Part number215-00042-000-A05
  • TypeProcess chamber
  • Tool mappingConfirm against the installed configuration
  • Condition record2nd Source New
Request a QuoteProduct details
Top view of a machined aluminum degas chamber body with sealing groove and multiple service openings

0020-70376 Degas chamber 2nd Source New

A degas chamber identified for Endura 5500 PVD. Supply review uses the full part number and installed chamber details because Endura configurations can use different chamber and interface arrangements.

  • Part number0020-70376
  • Tool recordEndura 5500 PVD
  • FunctionDegas
  • Condition record2nd Source New
Request a QuoteProduct details

Define the Replacement Scope

A chamber quotation should identify what is included around the chamber body. Lids, gas distribution components, heaters, lift hardware, valves, RPS hardware, seals, fasteners, sensors, and utility connections can change the price and the acceptance plan.

For a listed part number, Chinsortech checks the supplied record against the requested condition and interfaces. When the record is incomplete, the review can use old-part photos, dimensions, drawings, or a physical sample. Any dimensional or interface change must be agreed before production because a visually similar chamber is not proof of interchangeability.

Manufacturing and Quality Verification

Replacement chamber work starts with defined material, geometry, interfaces, and inspection requirements. Chinsortech develops and manufactures semiconductor equipment parts and assemblies, including PVD, CVD, and etch equipment components.

The production flow includes incoming-material inspection and a quality check after manufacturing. Nonconforming products follow a rework, return, or scrap path; reworked products return to inspection before release.

For a chamber project, the quotation and drawing review should state the dimensions, sealing surfaces, port locations, surface requirements, assembly scope, and any required functional or leak test. Test method, sampling, limits, and reports are confirmed for the specific order rather than assumed from a generic chamber description.

Information Needed for Price and Lead Time

Send the following information with the inquiry:

  1. Full part number, including suffix and revision.
  2. Tool platform, process, chamber function, and wafer size.
  3. Quantity and requested condition.
  4. Photos of the nameplate, chamber, interfaces, ports, and any damaged areas.
  5. Drawings, critical dimensions, or a sample when the part record is incomplete.
  6. Required inspection, documentation, packaging, and acceptance tests.
  7. Destination and requested trade term; provide the destination port for a CIF quote.

Price depends on material, machining and assembly scope, quantity, testing, packaging, and shipping requirements. Lead time is confirmed after the chamber record and supply boundary are clear.

Send Chamber Details for Review

AMAT Chamber FAQ

Is ‘AMAT chamber’ a single chamber model?

No. AMAT is a common abbreviation for Applied Materials, and its platforms can use different process, transfer, cooldown, degas, and support chambers. The exact chamber must be identified by part number, tool, process, wafer size, revision, and interfaces.

Can Chinsortech quote from the platform name alone?

A platform name can start the review, but it is not enough for final matching. Provide the installed part number and visual or dimensional evidence so the chamber record can be checked against the actual tool.

Are all five products listed as second-source new?

Yes. Each of the five specified product records identifies the listed item as “2nd Source New.” That condition applies to those exact product records and does not automatically describe every AMAT chamber or component.

Request an AMAT Chamber Quote

  • Phone: 18015354460
  • Email: [email protected]
  • WhatsApp: 18015354460
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

Provide the part number, installed tool, process, wafer size, quantity, and photos. Chinsortech will review the chamber identity and define the quoted supply scope.