Identifiers That Must MatchCentura II, DPS Poly, 200 mm, DRP1P3 and the installed robot, load-lock, orienter and degas interfaces define the relevant configuration.
Names That Do Not Prove CompatibilityCentura, DPS or 5200 used alone does not establish chamber, wafer-size, software or spare-part interchangeability.
Included-Hardware AcceptanceThe equipment list, serial number, installed chambers, handling modules, accessories and visible condition establish what is included in the sale.
Operational-Readiness AcceptancePower-on tests, leak checks, interlocks, robot motion, chamber work and process qualification require a separately agreed inspection or refurbishment scope.
Interfaces Closed Before ShipmentFootprint, electrical power, cooling water, gas panels, vacuum, exhaust, abatement, network and safety interlocks belong in the site-readiness review.
Commissioning Sequence At The FabRigging and connection are followed by leak checks, interlock tests, wafer-handling checks, chamber seasoning and recipe qualification.
01200 Mm DPS Poly EtchThe installed DPS Poly configuration supports dry plasma etch work on an 8-inch Centura II platform; process qualification remains tied to the receiving fab's recipe and chamber condition.
02Legacy Fab Capacity RestorationA matching Centura II DPS system can restore or expand legacy 200 mm capacity when the receiving site supports the required facilities, software and maintenance practices.
03Equipment Refurbishment ProjectsThe deinstalled tool provides a defined basis for inspection, subsystem refurbishment, parts planning and export preparation before installation at the destination fab.
Mixed Vacuum-System MaterialsAluminum and stainless-steel assemblies support the structure and vacuum path, while ceramics, quartz and elastomer seals appear by subsystem and installed configuration.
Used-Tool Preparation ScopeThe order can retain the as-is condition or add selected inspection, cleaning and refurbishment work against an agreed checklist.
Process-Facing Surface ReviewChamber surfaces, seals and vacuum hardware are evaluated by installed part number, visible condition and the receiving fab's acceptance criteria.
04Inspection And Shipping DocumentsAvailable inspection records and the packing list are organized for the shipment.
06Installation And Parts SupportRemote installation planning and spare-parts coordination are available.
01Isolate Energy, Vacuum And Process Gas Before HandlingQualified personnel must complete electrical lockout, vent the vacuum system, isolate process gases and verify decontamination status before inspection, rigging or disassembly.
02Use The Approved Lift Plan And Preserve Chamber AlignmentThe lift plan must support the mainframe and loose modules at their designated points. Chamber, robot and load-lock datums remain protected during transport and positioning.
03Reconnect Utilities Against The Centura II Facility DrawingsPower, cooling water, compressed gases, exhaust, abatement, vacuum and interlocks are connected only to the drawings and labels for this installed configuration.
04Complete Leak, Interlock And Wafer-Handling Checks Before ProcessCommissioning proceeds through vacuum leak checks, safety-interlock tests, robot and orienter checks, chamber seasoning and recipe qualification before production wafers enter the tool.
Configuration And Site Review Before QuotationThe serial number, chambers, handling modules, condition scope and receiving-site requirements are reviewed before quotation.
Inspection, Packing And Shipment RecordsInspection findings, agreed work, accessory lists, packing and shipment documents are recorded against the order.
Installation Planning And Parts CoordinationRemote installation planning, parts coordination and issue review are available for the delivered configuration.
Wuxi Zhanshuo