AMAT Centura II

The listing is tied to a used, deinstalled 200 mm (8 in) DPS system, serial 9532 and Tool ID DRP1P3. Keep those identifiers on the RFQ so the offer is not confused with 150 mm Centura II systems or later 300 mm DPS II configurations.

1. Lock the asset identity. Request nameplate photographs, the full chamber list, hardware revisions and a current configuration record.
2. Define included scope. Confirm loadlocks, robot, process modules, gas boxes, pumps, chillers, RF equipment, controls, manuals and loose parts.
3. Review condition evidence. Ask for deinstallation notes, maintenance history, leak-test or power-up evidence, missing-parts disclosure and storage conditions.
4. Inspect before final commitment. Use remote configuration evaluation first, then agree the physical inspection, acceptance checklist, dismantling, packing and handover scope.

Starting commercial terms are shown below for discovery. The binding price, availability and inclusions belong in the formal quotation after configuration confirmation.

Centura is a modular platform, not a complete configuration statement. Public sources show silicon, metal and dielectric etch families and 150, 200 and 300 mm generations; the reference asset itself is identified as 200 mm.

Process And Chamber Identity

Separate DPS from DPS Plus and record whether each installed module is configured for metal, poly or another qualified process. Recipe names and historical performance should be treated as asset records, not as guarantees.

Wafer Handling And Mechanical Fit

Verify 200 mm loadlocks, robot, chuck or electrostatic-chuck assembly, chamber kit, orientation and transfer interfaces. A shared family name does not prove that components or 150/200/300 mm hardware are interchangeable.

Facilities And Safe Restart

Build the relocation plan from actual power, cooling water, gases, exhaust, vacuum, footprint, weight and control-software records. Complete an EHS review, contamination assessment and agreed restart qualification before production use.

Chinsortech develops and manufactures semiconductor equipment parts and discusses component and equipment refurbishment support. For a legacy Centura asset, support quality depends on the identifiers and acceptance evidence supplied with each request.

If The Identifier Is Incomplete

A short label such as “DPS” can point to different process families, wafer sizes and generations, so visual similarity alone can lead to a wrong part or service scope.

Then Build A Match Record

Provide the chamber name, OEM part number, revision, wafer size, old-part photographs and installed-position details. Match critical dimensions, vacuum interfaces, material and surface condition, cleanliness, temperature and chemical compatibility.

So Acceptance Is Testable

Agree the inspection items, traceability documents, packaging method, exclusions and pass/fail criteria before work begins. Stock, price and lead time remain specific to the confirmed model, revision, condition and quantity.