amat centura etch

Chinsortech supplies selected replacement components and chamber-related parts recorded for Applied Materials Centura Etch configurations, including Centura 5200 DPS Metal, DPS Poly and DPS+ Poly records.

Centura is a multi-chamber platform, so the platform name alone does not confirm a match. Send the chamber name, wafer size, part number, revision and quantity so the target record can be checked before quotation.

Request a part match

What this Centura Etch page covers

The page is for commercial sourcing of selected parts. It is not a claim that every Centura platform, chamber or revision is interchangeable.

Platform and chamber are different

Centura can carry etch, CVD, HDP-CVD, epitaxy and RTP products. A Centura or Centura 5200 name narrows the search, but the process chamber and hardware version still need to be identified.

Etch records in the product list

The customer product list includes ETCH and DPS/ETCH records covering chamber bodies, liners, rings, ESC-related parts, lids, covers and other chamber components.

Quotation before commitment

Chinsortech uses the supplied part number, description and equipment mapping as the starting point. Availability, configuration and commercial terms are confirmed for each inquiry.

Selected Centura-related part records

The following representative records are taken from the customer product list. They show how the list maps parts to specific tool fields. They are not a live inventory or a complete Centura catalog.

Tool field in product list	Representative part numbers	Recorded descriptions
Centura 5200 DPS Metal	0040-02544	Upper Body, DPS Metal
Centura 5200 DPS Poly	0200-10377; 0021-09625; 0021-36743; 0200-36691	195 mm ceramic ring; lower chamber; DPS Poly lower chamber; 150 mm low-profile single ring
Centura 5200 DPS+ Poly	0020-33806	Upper Chamber DPS + Poly
Centura 5200 DCVD in ETCH-category records	0040-02609; 0021-06092; 0021-39385-003; 0200-00417; 0200-00435; 0200-09216; 0200-09315; 0200-10650	Slit-liner, chamber-door liner, lid plate, silicon insert and top rings, quartz pedestal ring, ceramic ESC cover ring and ceramic pumping-channel cover

Some ETCH records do not carry a specific tool field, including DPS ESC 0040-77771, ESC #29 0040-99952 and other rings or covers. Treat those entries as candidate records requiring equipment and drawing confirmation.

View the product category

Component families to identify

Use the component family only as a first filter. Exact identification still depends on the tool configuration and the complete part record.

Chamber bodies and liners

Examples include the Upper Body, DPS Metal, lower DPS chambers, chamber-door liners, slit-liner records and other chamber-body or liner descriptions.

Rings and ESC-related parts

The list contains silicon, quartz and ceramic ring descriptions, a 195 mm ceramic DPS chamber ring, 150 mm ring records and DPS ESC-related entries.

Lids, covers and gas-facing parts

Recorded examples include a lid plate, gas-inlet cover and ceramic pumping-channel cover. Similar names do not make parts interchangeable.

Compatibility information needed before quotation

For an AMAT Centura Etch part match, provide as many of the following fields as available:

Platform and mainframe generation, such as Centura, Centura II, Centura 300 or Centura AP.
Process family and complete chamber name, such as DPS Metal, DPS Poly, DPS+ Poly, eMax or another installed configuration.
Wafer size, including 150 mm, 200 mm or 300 mm where applicable.
Original part number, full revision or suffix, and the description shown on the label or bill of materials.
Installed-part photographs, interface dimensions, assembly position or upstream assembly number when the label is incomplete.
Required quantity, supply condition, destination and requested delivery timing.

Historical Centura configurations and upgraded tools can differ by chamber, hardware revision, software or retrofit record. Final fit and process suitability should be confirmed against the actual equipment records, drawings and acceptance requirements.

Send equipment details

Supply and inspection boundaries

Clear boundaries help the buyer compare the quoted record with the intended maintenance or replacement scope.

Part-specific supply condition

“2nd Source New” appears only on the individual records where it is explicitly stated. It should not be expanded into a blanket status for every Chinsortech part.

Quality process

Customer materials describe incoming-material inspection and final inspection. Products that fail inspection can enter rework, return or scrap paths; reworked products are inspected again before storage.

Commercial confirmation

Price and delivery depend on material, surface treatment, quantity, logistics and product requirements. Stock, lead time, certificates and acceptance documents are confirmed for the specific quotation.

How to request a Centura Etch part quote

Email the available equipment and part information to Chinsortech. A useful request includes:

Original part number and revision
Part description and assembly position
Centura mainframe, process chamber and wafer size
Required quantity and supply condition
Destination, packaging or cleanliness requirements
Photographs, drawings or a previous purchase record when identification is uncertain

For a CIF quotation, also provide the destination port. If the part number is not enough to identify the component, an old-part photo, drawing or physical sample can support the review.

Email [email protected]

Centura Etch sourcing FAQ

These answers keep the sourcing scope aligned with the supplied product records.

Does “AMAT Centura Etch” identify one exact machine?

No. It identifies a manufacturer/platform and etch intent, but the exact mainframe, process chamber, wafer size and hardware revision still need confirmation.

Can a Centura CVD part be treated as a Centura Etch part?

No. Centura can host different process families. CVD, etch, HDP-CVD, epitaxy and RTP components should be separated unless a verified equipment record supports the match.

Are the listed records guaranteed to be in stock?

No. The product list is a sourcing reference, not a live inventory statement. Availability and lead time are checked for the requested part and quantity.

What if I only have the platform name?

Send the platform name together with photos, labels, chamber details, wafer size and the old part description. Those details reduce the risk of matching a similar-looking but different component.

Does the page include a built-in inquiry form?

This page uses email and phone contact paths. No new form backend, drawing upload handler or chat workflow is being claimed by this page.

Contact Chinsortech

Wuxi Chinsor Technology Co., Ltd. develops and manufactures semiconductor equipment parts and provides related equipment after-sales services. For Centura Etch-related sourcing, contact the team with the complete part and equipment details.

Phone: +86 180 1535 4460
Email: [email protected]
Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

AMAT and Applied Materials are used on this page only to identify the target equipment family. Confirm the final match against the customer's installed tool records and the quoted part documentation.

Contact Chinsortech