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We provide high-precision vacuum chambers and core spare parts specially designed for amat / applied materials p5000 chamber to ensure excellent process consistency for 8-inch wafer processing. Chinsor Tech is a source manufacturing plant with 52 patents. Through its own precision processing workshop, it eliminates all middlemen and provides you with competitive ex-factory prices and faster delivery speeds.
Important parameters of amat / applied materials p5000 chamber It is mainly used in plasma enhanced chemical vapor deposition, physical vapor deposition and metal etching processes in the manufacture of 8-inch integrated circuits.
high-grade 6061-T6 aluminum alloy is selected, and through compactness flaw detection, it is ensured that the cavity has no microporous leakage in high vacuum environment, the vacuum stability is improved by 40%, and the wafer scrap rate caused by air leakage is effectively reduced.
the tolerance of key dimensions is strictly controlled within 0.02mm to ensure perfect mechanical cooperation with the original machine base and shower head, and the mechanical installation and debugging time during spare parts replacement is shortened by more than 30%.
The matching heating plate adopts advanced brazing technology, and the surface temperature uniformity is controlled within plus or minus 1.5, which significantly improves the consistency of film thickness and meets the strict requirements of mature process for high yield.
After multiple harsh hard anodic oxidation treatments, the hardness and wear resistance of the film layer reach the industry’s top standards, the service life is extended by 25% in the plasma bombardment environment, and the frequency of downtime and maintenance is significantly reduced.
before leaving the factory, it passes through helium mass spectrometry leak detection and ultrasonic precision cleaning between ten thousand purification to ensure that the leak rate is better than the standard index, reduce the adhesion of particle pollutants inside the cavity, and improve the cleanliness of the process environment.
completely refer to the original factory mechanical interface design, the gas path, water path and sensor interface position are accurately aligned, directly support the connection of the original automation components, realize zero difficulty seamless replacement and fast online.
With Chinsor Tech’s deep accumulation in the field of semiconductor cavity manufacturing, all products are finally assembled and measured in a controlled environment to ensure that the factory performance indicators are highly compatible with the original factory. We not only provide standardized cavities, but also have the ability to customize the depth of specific process pain points. By optimizing the inner wall flow field design, we help customers solve the particle control problems unique to old machines.
Chinsor Tech provides standing inventory and rapid manufacturing solutions to reduce the delivery cycle of key spare parts to less than 4 weeks for the problem of original production or long delivery of old machines.
As a source manufacturer, we help customers directly reduce the cost of purchasing core spare parts by more than 35% on the premise of ensuring that the material grade and processing accuracy are not lower than the original factory standards.
in view of the arc damage caused by the wear of the inner wall oxide layer, we provide enhanced ceramic coating or thickened oxide layer to improve the anti-ion bombardment ability and prolong the cavity maintenance period by 1 times.
Designed for teams responsible for the production of 8-inch analog, power and sensor chips, providing reliable machine cavity replacement solutions to ensure stable operation of the production line 24 hours a day.
to provide high-quality core vacuum chamber components for second-hand equipment manufacturers, to assist them in restoring old machines to factory performance standards, and to improve the yield and market competitiveness of the whole machine refurbishment project.
for the pursuit of cost-effective supply chain enterprises, to provide standardized spare parts produced by certified factories, optimize the spare parts inventory structure, effectively reduce long-term depreciation of fixed assets expenditure.
provide customized vacuum experimental chamber interfaces for laboratories conducting material modification or new film process research to meet the needs of diversified scientific research experiments and small-scale pilot production.
Before installation, please check whether there are scratches on the vacuum sealing surface, and use high-purity isopropyl alcohol with a dust-free cloth to wipe the inner wall to ensure that there is no residual particles.
Place the clean sealing ring flat into the cavity sealing groove, and it is strictly prohibited to twist or forcibly stretch to ensure excellent sealing performance in high vacuum environment.
use special lifting tools to align the cavity with the base, and tighten the bolts in diagonal order to ensure uniform force and prevent vacuum leakage caused by uneven force.
start the vacuum pump system, carry out the suction operation step by step and monitor the reading of the vacuum gauge to ensure that the leakage rate reaches the process standard before passing in the process gas for air running test.
certificate
Welcome to our Frequently Asked Questions page. We have compiled answers to common questions you may have, hoping to provide you with clear and quick solutions. If you cannot find the information you need here, please feel free to contact our customer support team.
AMAT P5000
Adapter platform
200mm
Wafer size
less than 1e-9
Vacuum leak rate
Wuxi Zhanshuo