amat parts

5000/5200 WXZ and Centura 5200 Part Selection

Find the blocker plate, perforated plate, blade, top cover, cooldown assembly, or WXZ chamber in this six-part selection. Chinsortech provides second-source new parts for review against your installed tool, chamber, and part revision.

Use the part numbers below to narrow your request, then send your equipment details and delivery requirements for a quotation.

Review the Six PartsRequest a Part Quote
Machined silver chamber assembly with a square base, circular center opening, weld seams, and mounting holes

Choose the WXZ Plate by Its Part Number

The two 8-inch EC WXZ plates have separate part numbers: 0020-42285 identifies the blocker plate, and 0020-42287 identifies the perforated plate. Match the required item to the installed assembly's BOM or drawing before selecting a product.

Part numberListed descriptionVisual identification
0020-42285PLATE, BLOCKER 8" EC WXZShallow circular plate with dense small holes and notches around the rim
0020-42287PLATE PERF 8INCH EC WXZCircular plate with a thick outer flange, a central hole array, and outer mounting holes

Both product listings identify Centura 5200 DCVD. The different names and geometry identify two candidates; their position in the assembly, revision, and mating dimensions determine which one your equipment requires.

If the old-part label is unreadable, provide photographs of both faces and the mounting edge, together with the assembly drawing or BOM reference. These records allow the request to be checked without guessing a missing part-number digit.

Check the Blade and Chamber Configuration

The blade and WXZ chamber have conflicting tool descriptions that need to be resolved against the installed process configuration.

Part numberTool descriptions requiring confirmationInformation to provide
0021-76356Centura 5200 DPS DCVD and Centura 5200 DPS POLYInstalled tool and chamber identification, the 6-inch blade's markings, revision, and assembly reference
0040-39883Centura 5200 DCVD and Centura 5200 WCVDComplete 5000/5200 tool and WXZ chamber identification, old-chamber markings, revision, and interface drawing

These labels do not establish that either part fits both configurations. Use the installed hardware, current BOM, formal drawing, and any validated installation record to determine the required part before ordering.

Six Parts for Your 5000/5200 Review

Each item below is listed as 2nd Source New. Review its individual description and detail page, then include the exact part number in your inquiry.

0020-42285 circular blocker plate with dense small perforations and notches around its outer rim

Shallow circular blocker plate shown from above on a white background.

0020-42285 PLATE, BLOCKER 8" EC WXZ, 2nd Source New

An 8-inch EC WXZ blocker plate candidate for a request referencing PN 0020-42285. Check its rim features and mounting relationship against the plate identified in your assembly documentation.

  • Part number0020-42285
  • Listed toolCentura 5200 DCVD
  • Description identifiersblocker plate; 8-inch; EC WXZ
  • Supply condition2nd Source New
Request a Quote for 0020-42285View Details
0020-42287 circular perforated plate with a thick outer flange, dense concentric hole array, and outer mounting holes

Perforated plate shown at an angle, exposing the flange thickness and central hole array.

0020-42287 PLATE PERF 8INCH EC WXZ, 2nd Source New

An 8-inch EC WXZ perforated plate with PN 0020-42287. Use the drawing's hole pattern, outer profile, and mating features when checking this candidate against the required assembly position.

  • Part number0020-42287
  • Listed toolCentura 5200 DCVD
  • Description identifiersperforated plate; 8-inch; EC WXZ
  • Supply condition2nd Source New
Request a Quote for 0020-42287View Details
0020-10186 square metal top cover with a large circular center opening and groups of mounting holes

Top cover shown from above with the center opening and perimeter holes visible.

0020-10186 COVER TOP 200MM, 2nd Source New

A top cover listed for a 200 mm configuration under PN 0020-10186. Compare the center opening and surrounding mounting pattern with the applicable cover drawing.

  • Part number0020-10186
  • Listed toolCentura 5200 DCVD
  • Description identifierstop cover; 200MM
  • Supply condition2nd Source New
Request a Quote for 0020-10186View Details

Define the Technical Acceptance Requirements

State the acceptance requirements for each part number before the quotation is finalized. A plate, blade, cover, and chamber assembly require different dimensions and interfaces to be reviewed.

RequirementInclude in the technical request
Identity and revisionFull PN, revision or suffix, drawing number, and BOM or assembly reference
Dimensions and interfacesApplicable drawing revision and the dimensions, mounting features, and mating interfaces requiring inspection
Material and surfaceRequired material specification, surface treatment, and applicable process-contact requirements
Cleanliness and packagingCleanliness criteria, handling restrictions, and protective packaging requirements
Inspection and documentsRequired checks, acceptance limits, certificates or reports, and the PN/revision references they must carry

Wuxi Chinsor Technology Co., Ltd. develops and manufactures semiconductor equipment components and provides related after-sales service. Its documented quality process includes incoming-material and post-production checks, disposition of nonconforming items, and reinspection after rework. Specify the product-level inspection methods and limits in your request so they can be addressed for the selected part.

Request a Quote for the Exact Part and Delivery Need

Use one line per part number when requesting multiple items. Include the quantity and requested supply condition with each line, then provide the delivery city, state, country, and required date for the order.

For each line, request confirmation of price, current availability, and lead time. Ask the quotation to identify the included components, agreed inspection documents, packaging, and shipping terms so you can compare the complete delivery scope.

For an alternate revision or replacement PN, include both the installed and proposed identifiers.

Send Your Parts List

Send Your 5000/5200 Parts Requirement

Send Chinsortech the selected part numbers and the equipment information needed to review them. Include links or references to old-part photos, labels, drawings, or BOM entries in the Requirement field.

  • Phone: 18015354460
  • Email: [email protected]
  • WhatsApp: 18015354460
  • Address: No.29-1, Huibei Road, Liangxi District, Wuxi City, China.

Add your technical acceptance requirements to the Requirement field or link to the applicable specification.